Preparation of single-phase Ti2AlN coating by magnetron sputtering with cost-efficient hot-pressed Ti-Al-N targets

doi:10.1016/j.ceramint.2018.06.055

CORC > 金属研究所 > 中国科学院金属研究所

	Preparation of single-phase Ti2AlN coating by magnetron sputtering with cost-efficient hot-pressed Ti-Al-N targets
	Li, Yueming 1,2,3; Zhao, Guorui 4; Qi, Hong 3; Li, Meishuan 3; Zheng, Yufeng 2; Qian, Yuhai 3; Sheng, Liyuan 1
刊名	CERAMICS INTERNATIONAL
	2018-10-01
卷号	44 期号:14 页码:17530-17534
关键词	Cost-efficient target Ti(2)AIN coating Magnetron sputtering Annealing Crystallization
ISSN号	0272-8842
DOI	10.1016/j.ceramint.2018.06.055
通讯作者	Qian, Yuhai(yhqian@imr.ac.cn) ; Sheng, Liyuan(lysheng@yeah.net)
英文摘要	In the present research, single-phase Ti2AlN coatings were prepared on polycrystalline Al2O3 from cost-efficient hot-pressed Ti-Al-N targets by D.C. magnetron sputtering and subsequent annealing treatment. SEM, TEM and XRD analyses were performed to characterize the microstructure and phase constituents of the Ti-Al-N target and coating. The results reveal that phase constituents of hot-pressed Ti-Al-N targets were affected by the synthesis temperature. When the synthesis temperature was 700 degrees C, the target mainly comprised alpha-Ti, TiN and Ti-Al intermetallics. While in the target synthesized at 900 degrees C, TiN, Ti-Al intermetallics and Ti2AlN were the main phase constituents. The as-deposited coatings from both targets exhibited typical amorphous crystal structure. Crystallization of the coating initiated between 500 degrees C and 600 degrees C. After annealing at 700 degrees C for 1 h, the amorphous coating was transformed to single-phase polycrystalline Ti2AlN coating. In general, single-phase Ti2AlN coatings could be obtained from the target whether with Ti2AlN or not. It was the element ratio of Ti:Al:N = 2:1:1 (at%) rather than the phase contents in the targets that was critical to fabricate single-phase Ti(2)AIN coating.
资助项目	Shenzhen Technology Innovation Project[JSGG201704121 45203293] ; Shenzhen Basic Research Project[JCYJ20170815153143221] ; Shenzhen Basic Research Project[JCYJ20160427170611414] ; National Natural Science Foundation of China[51571205] ; National Natural Science Foundation of China[51401209] ; National Natural Science Foundation of China[51271191]
WOS研究方向	Materials Science
语种	英语
出版者	ELSEVIER SCI LTD
WOS记录号	WOS:000442714100180
资助机构	Shenzhen Technology Innovation Project ; Shenzhen Basic Research Project ; National Natural Science Foundation of China
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/129319]
专题	金属研究所_中国科学院金属研究所
通讯作者	Qian, Yuhai; Sheng, Liyuan
作者单位	1.Peking Univ, Shenzhen Inst, Shenzhen 518057, Peoples R China 2.Peking Univ, Beijing 100871, Peoples R China 3.Chinese Acad Sci, Shenyang Natl Lab Mat Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China 4.Guangdong Inst New Mat, Natl Engn Lab Modern Mat Surface Engn Technol, Guangzhou 510651, Guangdong, Peoples R China
推荐引用方式 GB/T 7714	Li, Yueming,Zhao, Guorui,Qi, Hong,et al. Preparation of single-phase Ti2AlN coating by magnetron sputtering with cost-efficient hot-pressed Ti-Al-N targets[J]. CERAMICS INTERNATIONAL,2018,44(14):17530-17534.
APA	Li, Yueming.,Zhao, Guorui.,Qi, Hong.,Li, Meishuan.,Zheng, Yufeng.,...&Sheng, Liyuan.(2018).Preparation of single-phase Ti2AlN coating by magnetron sputtering with cost-efficient hot-pressed Ti-Al-N targets.CERAMICS INTERNATIONAL,44(14),17530-17534.
MLA	Li, Yueming,et al."Preparation of single-phase Ti2AlN coating by magnetron sputtering with cost-efficient hot-pressed Ti-Al-N targets".CERAMICS INTERNATIONAL 44.14(2018):17530-17534.