Modification of structure and wear resistance of closed-field unbalancedmagnetron sputtered MoS2 film by vacuum-heat-treatment | |
Zhang R(张瑞)2,3; Cui QF(崔琦峰)1; Weng LJ(翁立军)3; Sun JY(孙嘉奕)3; Hu M(胡明)3; Fu YL(伏彦龙)3; Wang DS(王德生)3; Jiang D(姜栋)3; Gao XM(高晓明)3 | |
刊名 | Surface & Coatings Technology |
2020 | |
期号 | 401页码:126215 |
英文摘要 | MoS2 film deposited was deposited by closed-field unbalanced-magnetron sputtering (CFUBMS), and its structural and tribological properties were modified by the heat treatment at temperature range of 100–500 °C in vacuum environment. Results revealed that as-deposited MoS2 film was composed of MoS2 plus a little MoO3 with a dense amorphous-like structure. After the vacuum heat treatment, MoS2 film was still very compact, but its microstructure was changed from amorphous-like to nano-crystalline states with the increase of heat treatment temperature. As a result, a MoS2 film with a microstructure of MoS2 nanocrystals embedded into its own amorphous matrix was obtained at middle temperature of 200 °C. Furthermore, MoO3 phase in the film was reduced to MoO2 after the vacuum heat treatment at high temperatures of 400 and 500 °C. Friction tests revealed that the wear resistance of MoS2 film in vacuum environment was significantly improved by the vacuum heat treatment at suitable temperature. The wear life of vacuum-heat-treated MoS2 film at 200 °C for 3 h was ~6.2 × 105 r, about four times longer than that of as-deposited MoS2 film. |
语种 | 英语 |
内容类型 | 期刊论文 |
源URL | [http://ir.licp.cn/handle/362003/26522] |
专题 | 兰州化学物理研究所_先进润滑与防护材料研究发展中心 |
通讯作者 | Jiang D(姜栋); Gao XM(高晓明) |
作者单位 | 1.上海宇航系统工程研究所 2.中国科学院大学 3.中国科学院兰州化学物理研究所 |
推荐引用方式 GB/T 7714 | Zhang R,Cui QF,Weng LJ,et al. Modification of structure and wear resistance of closed-field unbalancedmagnetron sputtered MoS2 film by vacuum-heat-treatment[J]. Surface & Coatings Technology,2020(401):126215. |
APA | Zhang R.,Cui QF.,Weng LJ.,Sun JY.,Hu M.,...&Gao XM.(2020).Modification of structure and wear resistance of closed-field unbalancedmagnetron sputtered MoS2 film by vacuum-heat-treatment.Surface & Coatings Technology(401),126215. |
MLA | Zhang R,et al."Modification of structure and wear resistance of closed-field unbalancedmagnetron sputtered MoS2 film by vacuum-heat-treatment".Surface & Coatings Technology .401(2020):126215. |
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