Modulation and Control Technology for Generating Movable Super-Diffraction Optical Needle by Oblique Incidence
Wang, Simo1; Yu, Siyang; Li, Fanxing1; Peng, Fuping1; Du, Jialin1; Qi, Bo; Shi, Lifang; Yan, Wei
刊名Applied Sciences-Basel
2020-07-29
卷号10期号:3页码:10155237-1-10
关键词Optical Needle Resolution Depth Of Focus High Aspect Ratio Movable
ISSN号2076-3417
DOI10.3390/app10155237
文献子类期刊论文
英文摘要

The movable super-diffraction optical needle (MSON) is a tightly focused beam like a needle, which can realize vector scanning on the focusing plane. Not only does it have a long focal depth, but its resolution also exceeds the diffraction limit. The modulation and control technology required for generating MSON by oblique incidence is explored in this manuscript for the purpose of processing high-aspect-ratio, sub-wavelength structures. As the optical needle generated by traditional methods is static and sensitive to variation of the angle information of the incident beam, here we introduce a confocal scanning system by using a two-dimensional galvanometer system, a scan lens, and a tube lens to control the oblique incidence angle. The effects of the oblique incidence angle on the resolution, depth of focus, uniformity, and side lobes of the MSON were analyzed. Further, the voltage-controlled liquid crystal located between the scan lens and the 2D galvanometer system can be used to compensate for the additional phase difference caused by oblique incidence. The aspect ratio is defined as the ratio of depth of focus to resolution. By modulating and controlling the light field, the MSON with high aspect ratio (7.36), sub-diffractive beam size (0.42 lambda), and long depth of focus (3.09 lambda) has been obtained with homogeneous intensity, and suppressed side lobes. High speed, high axial positioning tolerance, and high-resolution laser processing can also be achieved, which removes the restrictions presented by traditional laser processing technology, for which high resolution and long depth of focus cannot be achieved simultaneously.

出版地BASEL
WOS关键词Field
WOS研究方向Chemistry ; Engineering ; Materials Science ; Physics
语种英语
出版者MDPI
WOS记录号WOS:000559157100001
内容类型期刊论文
源URL[http://ir.ioe.ac.cn/handle/181551/10040]  
专题环境光学研究院
作者单位1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式
GB/T 7714
Wang, Simo,Yu, Siyang,Li, Fanxing,et al. Modulation and Control Technology for Generating Movable Super-Diffraction Optical Needle by Oblique Incidence[J]. Applied Sciences-Basel,2020,10(3):10155237-1-10.
APA Wang, Simo.,Yu, Siyang.,Li, Fanxing.,Peng, Fuping.,Du, Jialin.,...&Yan, Wei.(2020).Modulation and Control Technology for Generating Movable Super-Diffraction Optical Needle by Oblique Incidence.Applied Sciences-Basel,10(3),10155237-1-10.
MLA Wang, Simo,et al."Modulation and Control Technology for Generating Movable Super-Diffraction Optical Needle by Oblique Incidence".Applied Sciences-Basel 10.3(2020):10155237-1-10.
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