Fabrication of micropyramid structure by fly-cutting

doi:10.1117/1.OE.58.1.013107

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 薄膜光学相机总体室

	Fabrication of micropyramid structure by fly-cutting
	Huang, Yuetian 2,3; Li, Shijie 1; Fan, Bin 2; Wan, Yongjian 2; Wu, Shibin 2; Zhang, Jin 1; Liang, Haifeng 1; Ge, Shaobo 1
刊名	Optical Engineering
	2019
卷号	58 期号:1
ISSN号	0091-3286
DOI	10.1117/1.OE.58.1.013107
文献子类	期刊论文
英文摘要	Microgroove cutting by fly-cutting is studied to obtain the optimized parameters to get a smooth groove with less burr and chip. We analyzed the reason for the second groove and reduced the cutting times to fade the effect of machine reposition error. Introducing additional empty cut further reduced the burr and chip. To get the ideal micropyramid arrays, all factors must be considered and controlled. Finally, processed pyramid arrays with the depth of 1 μm whose structure distributed the entire surface evenly and with no obvious chip. © 2019 Society of Photo-Optical Instrumentation Engineers (SPIE).
语种	英语
出版者	SPIE
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9752]
专题	薄膜光学相机总体室
作者单位	1.Xi'an Technological University, Shaanxi Province Key Laboratory of Thin Film Technology and Optical Test, Xi'an, China 2.Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu, China; 3.University of Chinese Academy of Sciences, Beijing, China;
推荐引用方式 GB/T 7714	Huang, Yuetian,Li, Shijie,Fan, Bin,et al. Fabrication of micropyramid structure by fly-cutting[J]. Optical Engineering,2019,58(1).
APA	Huang, Yuetian.,Li, Shijie.,Fan, Bin.,Wan, Yongjian.,Wu, Shibin.,...&Ge, Shaobo.(2019).Fabrication of micropyramid structure by fly-cutting.Optical Engineering,58(1).
MLA	Huang, Yuetian,et al."Fabrication of micropyramid structure by fly-cutting".Optical Engineering 58.1(2019).