Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy

doi:10.1117/12.2505137

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微细加工光学技术国家重点实验室（开放室）

	Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy
	Xie, Zhongye 1,2; Tang, Yan 2; Liu, Xi 1,2; Yang, Kejun 1,2; Hu, Song 2
	2019
会议日期	June 26, 2018 - June 29, 2018
会议地点	Chengdu, China
卷号	10841
DOI	10.1117/12.2505137
页码	1084105
英文摘要	Effective measurement of the surface and thickness variation of thin films are important to achieve a special function and better performance for a coated optical device. In this research, we propose a new incoherent technique named Fourier transform-based structured illumination microscopy (FTSIM) to detect the surface topography and thickness distribution. In this technique, a sinusoidal fringe pattern produced by digital micro-mirror devices (DMD) is projected onto the sample. The modulation estimation which depends on the surface and thickness of thin films is obtained by two-dimensional Fourier transform algorithm. Further, separating the reflected signals from the film boundaries, the surface finish of the film, as well as a film thickness map, can be achieved at the same time. With this method, only one pattern is required to determine the modulation value of a whole field. The measurement system is relatively simple and only an ordinary objective is enough to achieve imaging of the sample. Both theory and experiments are conducted in detail to demonstrate that the availability of this method. © 2019 SPIE.
会议录	Proceedings of SPIE 10841 - 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics
会议录出版者	SPIE
文献子类	会议论文
语种	英语
ISSN号	0277-786X
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9618]
专题	光电技术研究所_微细加工光学技术国家重点实验室（开放室）
作者单位	1.University of Chinese Academy of Sciences, Beijing; 100049, China 2.State Key Laboratory of Optical Technologies for Micro-fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan; 610209, China;
推荐引用方式 GB/T 7714	Xie, Zhongye,Tang, Yan,Liu, Xi,et al. Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy[C]. 见:. Chengdu, China. June 26, 2018 - June 29, 2018.