Finite-element-method study of the effect of thin-film residual stresses on high-order aberrations of deformable mirrors

doi:10.1016/j.surfcoat.2019.01.119

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 自适应光学技术研究室（八室）

	Finite-element-method study of the effect of thin-film residual stresses on high-order aberrations of deformable mirrors
	Zhang, Yaoping 2,3; Long, Guoyun 1,2,3; Zhou, Hong 2,3; Fan, Junqi 2,3; Cui, Hao 2,3; Cheng, Lin 2,3
刊名	Surface and Coatings Technology
	2019-05-25
卷号	366 页码:35-40
关键词	Residual stresses Deformable mirror High-order aberrations Thin film
ISSN号	0257-8972
DOI	10.1016/j.surfcoat.2019.01.119
文献子类	期刊论文
英文摘要	To analyze the influence of the thin-film residual stresses on the high-order aberrations of deformable mirrors, a finite-element model of a 37-element deformable mirror was constructed. The deformation and high-order aberrations were simulated after applying residual stresses to the mirrors. The appearance of high-order aberrations became more significant as the mirror thickness decreased. A print-through effect due to the piezoelectric actuators was obvious when the mirror thickness was 1 mm. The peak-to-valley size decreased from 0.320 to 0.158 μm when the mirror thickness increased from 1 to 3 mm, and the corresponding residual error after removing the low-order Zernike coefficients decreased from 0.281 to 0.156 μm. High-order aberrations of the deformed mirrors were very small at a mirror thickness of 3 mm. These results should be useful for designing deformable mirrors for adaptive optical systems in the future. © 2019 Elsevier B.V.
WOS关键词	BEAM ; COATINGS
WOS研究方向	Materials Science, Coatings & Films ; Physics, Applied
语种	英语
出版者	Elsevier B.V.
WOS记录号	WOS:000465366400005
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9815]
专题	光电技术研究所_自适应光学技术研究室（八室）
作者单位	1.University of Chinese Academy of Sciences, Beijing; 100190, China 2.The Key Laboratory on Adaptive Optics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China; 3.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China;
推荐引用方式 GB/T 7714	Zhang, Yaoping,Long, Guoyun,Zhou, Hong,et al. Finite-element-method study of the effect of thin-film residual stresses on high-order aberrations of deformable mirrors[J]. Surface and Coatings Technology,2019,366:35-40.
APA	Zhang, Yaoping,Long, Guoyun,Zhou, Hong,Fan, Junqi,Cui, Hao,&Cheng, Lin.(2019).Finite-element-method study of the effect of thin-film residual stresses on high-order aberrations of deformable mirrors.Surface and Coatings Technology,366,35-40.
MLA	Zhang, Yaoping,et al."Finite-element-method study of the effect of thin-film residual stresses on high-order aberrations of deformable mirrors".Surface and Coatings Technology 366(2019):35-40.