Profilometry with Enhanced Accuracy Using Differential Structured Illumination Microscopy

doi:10.1109/LPT.2019.2916370

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微电子装备总体研究室（四室）

	Profilometry with Enhanced Accuracy Using Differential Structured Illumination Microscopy
	Xie, Zhongye 1,2; Tang, Yan 2; Liu, Xi 2; Liu, Junbo 2; He, Yu 2; Hu, Song 2
刊名	IEEE Photonics Technology Letters
	2019-07-01
卷号	31 期号:13 页码:1017-1020
关键词	Microscopy surface topography thickness measurement
ISSN号	1041-1135
DOI	10.1109/LPT.2019.2916370
文献子类	期刊论文
英文摘要	The conventional structured illumination micro-scopy (SIM) reconstructs the surface through determining the focal position from the modulation depth response (MDR) using the Gaussian fitting. In this letter, an innovative differential structured illumination microscopy (DSIM) is developed. This technique exploits the position at the linear portion of the MDR to achieve the measurements. To extract this position, two detectors are used to generate the differential modulation depth response (DMDR). After that, the zero point of the DMDR for each pixel is extracted by the linear fitting technique. The experiments and theoretical analysis are elaborated to verify that the DSIM can greatly enhance the axial accuracy, providing that the potential to be applied in high-precision measurement. © 1989-2012 IEEE.
WOS关键词	LIGHT
WOS研究方向	Engineering, Electrical & Electronic ; Optics ; Physics, Applied
语种	英语
出版者	Institute of Electrical and Electronics Engineers Inc.
WOS记录号	WOS:000471704700006
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9707]
专题	光电技术研究所_微电子装备总体研究室（四室）
作者单位	1.Department of Materials and Optoelectronics, University of Chinese Academy of Sciences, Beijing; 100049, China; 2.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China
推荐引用方式 GB/T 7714	Xie, Zhongye,Tang, Yan,Liu, Xi,et al. Profilometry with Enhanced Accuracy Using Differential Structured Illumination Microscopy[J]. IEEE Photonics Technology Letters,2019,31(13):1017-1020.
APA	Xie, Zhongye,Tang, Yan,Liu, Xi,Liu, Junbo,He, Yu,&Hu, Song.(2019).Profilometry with Enhanced Accuracy Using Differential Structured Illumination Microscopy.IEEE Photonics Technology Letters,31(13),1017-1020.
MLA	Xie, Zhongye,et al."Profilometry with Enhanced Accuracy Using Differential Structured Illumination Microscopy".IEEE Photonics Technology Letters 31.13(2019):1017-1020.