Improving angular accuracy of a scanning mirror based on error modeling and correction

doi:10.3390/s19020367

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 光电探测技术研究室（三室）

	Improving angular accuracy of a scanning mirror based on error modeling and correction
	Fan, Yue; Ma, Wenli; Jiang, Ping; Huang, Jinlong; Chen, Kewei; Pan, Nian
刊名	Sensors (Switzerland)
	2019-01-02
卷号	19 期号:2
关键词	scanning mirror angular accuracy eddy current displacement sensor error model angle calibration model correction
ISSN号	1424-8220
DOI	10.3390/s19020367
文献子类	期刊论文
英文摘要	Scanning mirrors appear to be key components in optoelectronic systems for line-of-sight (LOS) stabilization. For improving the angular accuracy of a scanning mirror based on the eddy current displacement sensor measurement, an angular error-correction method is proposed and demonstrated. A mathematic angular error model with physical parameters was developed, and the cross-validation method was employed to determine the reasonable order of the Maclaurin series used in the error model, which increased the exactitude and robustness of the correction method. The error parameters were identified by accurately fitting the calibrated angular errors with the error model, which showed excellent error prediction performance. Based on the angular calculation model corrected by the error model, the closed-loop control system was established to obtain accurate deflection angles. Experimental results show that within the deflection angle of ±1.5 deg, the angular accuracy was improved from 0.28 deg to less than 1.1 arcsec, and the standard deviation for six measurements was less than 1.2 arcsec, which indicates that the angle correction method was effective in improving the linearity of the eddy current sensors and reducing the influence of manufacturing and installation errors. © 2019 by the authors. Licensee MDPI, Basel, Switzerland.
WOS关键词	ROTATION ANGLE MEASUREMENT ; POINTING ACCURACY ; MOTION ; CALIBRATION
WOS研究方向	Chemistry, Analytical ; Engineering, Electrical & Electronic ; Instruments & Instrumentation
语种	英语
出版者	MDPI AG, Postfach, Basel, CH-4005, Switzerland
WOS记录号	WOS:000458569300150
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9806]
专题	光电技术研究所_光电探测技术研究室（三室）
作者单位	Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China
推荐引用方式 GB/T 7714	Fan, Yue,Ma, Wenli,Jiang, Ping,et al. Improving angular accuracy of a scanning mirror based on error modeling and correction[J]. Sensors (Switzerland),2019,19(2).
APA	Fan, Yue,Ma, Wenli,Jiang, Ping,Huang, Jinlong,Chen, Kewei,&Pan, Nian.(2019).Improving angular accuracy of a scanning mirror based on error modeling and correction.Sensors (Switzerland),19(2).
MLA	Fan, Yue,et al."Improving angular accuracy of a scanning mirror based on error modeling and correction".Sensors (Switzerland) 19.2(2019).