Investigation on secondary electron emission characteristics of double-layer structures
Wang, Dan4; He, Yongning4; Guo, Junjiang1,2,3; Cai, Yahui4; Mao, Zhangsong4; Ye, Ming4
刊名Journal of Applied Physics
2021-03-07
卷号129期号:9
ISSN号00218979;10897550
DOI10.1063/5.0023325
产权排序2
英文摘要

Secondary electron (SE) emission (SEE) from material surfaces is a frequent phenomenon in space and vacuum environments. SEE modulation is important since it governs the performance of some devices such as electronic multipliers or induces some detrimental effects such as multipactors. Surface coating has been reported to modulate SEE effectively, whereas SEE behaviors of coating structures are not clearly understood yet, and the appropriate theory to describe SEE characteristics quantitatively for coating structures is less developed so far. Here, we have prepared four alumina coatings possessing various thicknesses to research the SEE characteristics of coating structures and have shown how the coating thickness affects the SEE behaviors. Besides, by considering coating/substrate as an ideal double-layer structure, we have derived several equations to describe the producing, transmitting, and escaping processes of excited inner SEs and finally constructed a unidimensional SEE model for double-layer structures. The model is applicable to reveal the dependence of trueSE yield (TSEY) on the top and bottom layers' physical properties and estimate TSEY proportions contributed by the top and bottom layers at random energy points. By employing the concept, SEE characteristics of Al2O3/Si, MgO/Si, and TiO2/Si double-layer structureshave been quantitatively interpreted. Moreover, the abnormal SEY curve with a double-hump shape, which is induced by the peak position distinction of SiO2/Si structures, can also be explained. This work is of great significance to comprehend TSEY modulating regularities of various double-layer structures applied in surface engineering. © 2021 Author(s).

语种英语
出版者American Institute of Physics Inc.
WOS记录号WOS:000630435000001
内容类型期刊论文
源URL[http://ir.opt.ac.cn/handle/181661/94572]  
专题特种光纤材料及器件研究中心
通讯作者He, Yongning
作者单位1.University of Chinese Academy of Sciences (UCAS), Beijing; 100049, China
2.Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Shaanxi Key Lab of Information Photonic Technique, School of Electronics and Information Engineering, Xian Jiaotong University, Xian; 710049, China;
3.State Key Laboratory of Transient Optics and Photonics, Xian Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xian; 710119, China;
4.School of Microelectronics, Xian Jiaotong University, Xian; 710049, China;
推荐引用方式
GB/T 7714
Wang, Dan,He, Yongning,Guo, Junjiang,et al. Investigation on secondary electron emission characteristics of double-layer structures[J]. Journal of Applied Physics,2021,129(9).
APA Wang, Dan,He, Yongning,Guo, Junjiang,Cai, Yahui,Mao, Zhangsong,&Ye, Ming.(2021).Investigation on secondary electron emission characteristics of double-layer structures.Journal of Applied Physics,129(9).
MLA Wang, Dan,et al."Investigation on secondary electron emission characteristics of double-layer structures".Journal of Applied Physics 129.9(2021).
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