Characterization of optical waveguide in chalcogenide glass formed by helium ion implantation
Chen, Jing-Yi3; Zhou, Qi3; Wang, Yue3; Zhu, Qi-Feng3; Tang, Zhong-Liang2; Guo, Hai-Tao1; Liu, Chun-Xiao3
刊名INDIAN JOURNAL OF PHYSICS
关键词Optical waveguide Ion implantation Chalcogenide glasses Refractive index profile
ISSN号0973-1458;0974-9845
DOI10.1007/s12648-020-01768-6
产权排序3
英文摘要

In this work, an optical waveguide in the chalcogenide glass (80GeS(2)-15Ga(2)S(3)-5Sb(2)S(3)) is fabricated for the first time and its optical properties are investigated. A one-dimensional chalcogenide waveguide structure has been formed by 550 keV He(+)ion implantation with a dose of 4 x 10(16)ions/cm(2)at room temperature. The effective refractive indices of the guided modes at the wavelength of 632.8 nm were measured with the aid of the Model 2010 Prism Coupler system. The refractive index profile, a critical factor in the analysis of waveguide structure, was reconstructed by the reflectivity calculation method. It was found that a positive change of refractive index occurred in the waveguide region, and an optical barrier with decreased refractive index was built at the end of the ion trajectory, i.e., producing a type of "well + barrier" structure. The SRIM 2013 program was utilized to display the profile of the energy loss versus the penetrated depth when the incident ion beam implanted. The near-field intensity distribution for the fundamental mode along the TE polarization was simulated through the finite-difference beam propagation method. From our experiments, these data provide a great deal of useful information about the manufacture of the chalcogenide waveguide structure.

语种英语
出版者INDIAN ASSOC CULTIVATION SCIENCE
WOS记录号WOS:000542666600003
内容类型期刊论文
源URL[http://ir.opt.ac.cn/handle/181661/93567]  
专题特种光纤材料及器件研究中心
通讯作者Tang, Zhong-Liang; Liu, Chun-Xiao
作者单位1.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China
2.Huaibei Normal Univ, Coll Phys & Elect Informat, Huaibei 235000, Anhui, Peoples R China
3.Nanjing Univ Post & Telecommun, Coll Elect & Opt Engn, Nanjing 210023, Peoples R China
推荐引用方式
GB/T 7714
Chen, Jing-Yi,Zhou, Qi,Wang, Yue,et al. Characterization of optical waveguide in chalcogenide glass formed by helium ion implantation[J]. INDIAN JOURNAL OF PHYSICS.
APA Chen, Jing-Yi.,Zhou, Qi.,Wang, Yue.,Zhu, Qi-Feng.,Tang, Zhong-Liang.,...&Liu, Chun-Xiao.
MLA Chen, Jing-Yi,et al."Characterization of optical waveguide in chalcogenide glass formed by helium ion implantation".INDIAN JOURNAL OF PHYSICS
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