Investigation of dwell time based on lucy-richardson algorithm and gercherg surface continuation algorithm

doi:10.1117/12.2579836

CORC > 西安光学精密机械研究所 > 中国科学院西安光学精密机械研究所 > 先进光学元件试制中心

	Investigation of dwell time based on lucy-richardson algorithm and gercherg surface continuation algorithm
	Qian, XinJie 1,2; Ma, Zhen 2; Yao, Yongsheng 1,2; Shen, Le 2
	2020
会议日期	2020-06-29
会议地点	Shanghai, China
关键词	Dwell time Lucy-Richardson algorithm Edge continuation Gerchberg extrapolation algorithm Optical processing
卷号	11568
DOI	10.1117/12.2579836
英文摘要	Computer-controlled optical surface forming technology (CCOS) can greatly improve the processing accuracy and processing efficiency of optical mirrors. The most critical problem is the solution of dwell time, which will directly affect the final convergence of the surface shape. it is found through analysis that the solution of the dwell time is a deconvolution process, which is the same as the mathematical model of the Lucy-Richardson algorithm in image restoration technology, so the algorithm can be applied to Solution of dwell time; At the same time, in order to eliminate the high-frequency shape errors caused by discontinuities at the edges of the face shapes, the original shapes need to be extended to achieve smooth connections. The two-dimensional Gercherg bandwidth-limited continuation algorithm can achieve this requirement. The simulation results show that the root mean square value (rms) and peak-valley value (pv) converge from the initial 0.2534λ, 1.494λ (λ=632.8nm) to 0.0158λ and 0.393λ, which proves the effectiveness of the algorithm. Compared with the Lucy-Richardson algorithm, other traditional solving methods have simpler calculation process, higher calculation efficiency, and higher convergence rate. © 2020 SPIE. All rights reserved.
产权排序	1
会议录	AOPC 2020: Optics Ultra Precision Manufacturing and Testing
会议录出版者	SPIE
语种	英语
ISSN号	0277786X;1996756X
ISBN号	9781510639577
WOS记录号	WOS:000616198900039
内容类型	会议论文
源URL	[http://ir.opt.ac.cn/handle/181661/94435]
专题	先进光学元件试制中心
作者单位	1.University of Chinese Academy of Science, Beijing; 100049, China 2.Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Science, Xi'an 710119, China;
推荐引用方式 GB/T 7714	Qian, XinJie,Ma, Zhen,Yao, Yongsheng,et al. Investigation of dwell time based on lucy-richardson algorithm and gercherg surface continuation algorithm[C]. 见:. Shanghai, China. 2020-06-29.