Semiconductor laser device capable of suppressing leakage current in light emitting end surface and method for manufacturing the same
YOKOTA, MAKOTO
2003-05-15
著作权人SHARP KABUSHIKI KAISHA
专利号US20030091079A1
国家美国
文献子类发明申请
其他题名Semiconductor laser device capable of suppressing leakage current in light emitting end surface and method for manufacturing the same
英文摘要The present invention relates to a semiconductor laser device having a protective coating with a high-reliability formed on an end surface, and to a method for manufacturing the same. According to the present invention, in forming a semiconductor laser device, an electrode comprising Au is patterned so that the electrode does not exist in the vicinity of a light emitting end surface. Thereby, even when an Si film is formed on the light emitting end surface, the Si film is prevented from contacting with the light emitting end surface. In addition, after patterning the electrode, an insulating film (a silicon nitride film) is formed on the electrode for preventing the Si in the protective coating on the end surface from contacting with Au in the electrode, even when the Si film contacts with a surface of the electrode.
公开日期2003-05-15
申请日期2002-11-08
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/88710]  
专题半导体激光器专利数据库
作者单位SHARP KABUSHIKI KAISHA
推荐引用方式
GB/T 7714
YOKOTA, MAKOTO. Semiconductor laser device capable of suppressing leakage current in light emitting end surface and method for manufacturing the same. US20030091079A1. 2003-05-15.
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