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	Illumination means with uniform energy profile and vcsel based low coherence emitter for confocal 3D scanner
	VERKER, TAL; ATIYA, YOSSEF
	2017-07-05
著作权人	ALIGN TECHNOLOGY, INC.
专利号	EP3186589A1
国家	欧洲专利局
文献子类	发明申请
其他题名	Illumination means with uniform energy profile and vcsel based low coherence emitter for confocal 3D scanner
英文摘要	Methods and apparatus for measuring objects comprise a plurality of light sources to generate a plurality of light beams directed toward a spot generator array comprising a plurality of spot generating lenses. The plurality of light sources is separated from the spot generator array with a separation distance sufficient to overlap the plurality of light beams at each of the spot generating lenses. The overlap of each of the beams at each of the spot generating lenses provides smoothing of the energy profile of the light energy incident on the spot generating lenses. The spot generator array generates focused spots comprising overlapping focused beams. The overlapping beams may comprise overlapping beams of a vertical cavity surface emitting laser (VCSEL) array, and the overlapping focused beams can decrease optical artifacts.
公开日期	2017-07-05
申请日期	2015-08-24
状态	申请中
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/85357]
专题	半导体激光器专利数据库
作者单位	ALIGN TECHNOLOGY, INC.
推荐引用方式 GB/T 7714	VERKER, TAL,ATIYA, YOSSEF. Illumination means with uniform energy profile and vcsel based low coherence emitter for confocal 3D scanner. EP3186589A1. 2017-07-05.

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