Semiconductor laser and manufacture thereof
YAMAZOE YOSHIMITSU; NISHIZAWA HIDEAKI; OKUDA HIROSHI
1983-06-30
著作权人SUMITOMO DENKI KOGYO KK
专利号JP1983110086A
国家日本
文献子类发明申请
其他题名Semiconductor laser and manufacture thereof
英文摘要PURPOSE:To simplify the manufacturing process as well as to obtain the buried type element of high performance by a method wherein an insulating thin film material having a striped type window is provided on the first conductive type substrate, and a clad layer, consisting of the first or the second conductive type active layer and the second conductive type clad layer and a contact layer, are laminated one upon another. CONSTITUTION:An amorphous insulating material thin film 2 such as SiO2 is grown on an N type InP substrate 7 using CVD method, and an exposed surface 13 is generated on the substrate 7 corresponding to a strap forming region by performing a photolithographic method and a chemical etching method. Then, utilizing the characteristic wherein a single crystal layer alone is generated on the exposed surface 13 when an epitaxial growing method is performed, an N type first clad layer 6, an In1-x, Gax, ASy, P1-y, layer 3 are laminated and epitaxially grown on the whole surface. Through these procedures, the desired striped buried structure is obtained, and a P type and an N type electrodes 3 and 9 are coated on the front and the back sides.
公开日期1983-06-30
申请日期1981-12-24
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/84127]  
专题半导体激光器专利数据库
作者单位SUMITOMO DENKI KOGYO KK
推荐引用方式
GB/T 7714
YAMAZOE YOSHIMITSU,NISHIZAWA HIDEAKI,OKUDA HIROSHI. Semiconductor laser and manufacture thereof. JP1983110086A. 1983-06-30.
个性服务
查看访问统计
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。


©版权所有 ©2017 CSpace - Powered by CSpace