Fabrication of hollow polymer microstructures using dielectric and capillary forces
Tonry, Catherine E. H.2; Patel, Mayur K.2; Yu, Weixing3; Desmulliez, Marc P. Y.1; Bailey, Christopher2
刊名MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
2020-02
卷号26期号:2页码:301-308
ISSN号0946-7076;1432-1858
DOI10.1007/s00542-019-04409-z
产权排序2
英文摘要

Electric Field Assisted Capillarity is a novel one-step process suitable for the fabrication of hollow polymer microstructures. The process, demonstrated to work experimentally on a microscale using Polydimethylsiloxane (PDMS), makes use of both the electrohydrodynamics of polymers subject to an applied voltage and the capillary force on the polymers caused by a low contact angle on a heavily wetted surface. Results of two-dimensional numerical simulations of the process are discussed in this paper for the special case of production of microfluidic channels. The paper investigates the effects of altering key parameters including the contact angle with the top mask, the polymer thickness and air gap, the permittivity of the polymer, the applied voltage and geometrical variations on the final morphology of the microstructure. The results from these simulations demonstrate that the capillary force caused by the contact angle has the greatest effect on the final shape of the polymer microstructures.

语种英语
出版者SPRINGER HEIDELBERG
WOS记录号WOS:000511470900002
内容类型期刊论文
源URL[http://ir.opt.ac.cn/handle/181661/93298]  
专题西安光学精密机械研究所_光学影像学习与分析中心
通讯作者Tonry, Catherine E. H.
作者单位1.Heriot Watt Univ, Sch Engn & Phys Sci, Microsyst Engn Ctr MISEC, Earl Mountbatten Bldg, Edinburgh EH14 4AS, Midlothian, Scotland
2.Univ Greenwich, Ctr Numer Modelling & Proc Anal, CMRG, 30 Pk Row, London SE10 9LS, England
3.Chinese Acad Sci, Xian Inst Opt & Precis Mech, Xian, Shaanxi, Peoples R China
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GB/T 7714
Tonry, Catherine E. H.,Patel, Mayur K.,Yu, Weixing,et al. Fabrication of hollow polymer microstructures using dielectric and capillary forces[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2020,26(2):301-308.
APA Tonry, Catherine E. H.,Patel, Mayur K.,Yu, Weixing,Desmulliez, Marc P. Y.,&Bailey, Christopher.(2020).Fabrication of hollow polymer microstructures using dielectric and capillary forces.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,26(2),301-308.
MLA Tonry, Catherine E. H.,et al."Fabrication of hollow polymer microstructures using dielectric and capillary forces".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 26.2(2020):301-308.
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