Enhanced performance of AlN SAW devices with wave propagation along the 〈11−20〉 direction on c-plane sapphire substrate

	Enhanced performance of AlN SAW devices with wave propagation along the 〈11−20〉 direction on c-plane sapphire substrate
	Yujie Ai ; Shuai Yang ; Zhe Cheng ; Lian Zhang ; Lifang Jia ; Boyu Dong ; Junxi Wang ; Yun Zhang
刊名	Journal of Physics D: Applied Physics
	2019
卷号	52 期号:21 页码:215103
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/29809]
专题	半导体研究所_固态光电信息技术实验室
推荐引用方式 GB/T 7714	Yujie Ai ; Shuai Yang ; Zhe Cheng ; Lian Zhang ; Lifang Jia ;Boyu Dong ; Junxi Wang ; Yun Zhang. Enhanced performance of AlN SAW devices with wave propagation along the 〈11−20〉 direction on c-plane sapphire substrate[J]. Journal of Physics D: Applied Physics,2019,52(21):215103.
APA	Yujie Ai ; Shuai Yang ; Zhe Cheng ; Lian Zhang ; Lifang Jia ;Boyu Dong ; Junxi Wang ; Yun Zhang.(2019).Enhanced performance of AlN SAW devices with wave propagation along the 〈11−20〉 direction on c-plane sapphire substrate.Journal of Physics D: Applied Physics,52(21),215103.
MLA	Yujie Ai ; Shuai Yang ; Zhe Cheng ; Lian Zhang ; Lifang Jia ;Boyu Dong ; Junxi Wang ; Yun Zhang."Enhanced performance of AlN SAW devices with wave propagation along the 〈11−20〉 direction on c-plane sapphire substrate".Journal of Physics D: Applied Physics 52.21(2019):215103.