3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity

	3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity
	Zeji Chen ; Fengxiang Wang ; Quan Yuan ; Xiao Kan ; Jinling Yang ; Jicong Zhao ; Fuhua Yang
刊名	SENSORS AND ACTUATORS A-PHYSICAL
	2019
卷号	286 页码:123-132
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/29606]
专题	半导体研究所_半导体集成技术工程研究中心
推荐引用方式 GB/T 7714	Zeji Chen ; Fengxiang Wang ; Quan Yuan ; Xiao Kan ; Jinling Yang ; Jicong Zhao ; Fuhua Yang. 3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity[J]. SENSORS AND ACTUATORS A-PHYSICAL,2019,286:123-132.
APA	Zeji Chen ; Fengxiang Wang ; Quan Yuan ; Xiao Kan ; Jinling Yang ; Jicong Zhao ; Fuhua Yang.(2019).3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity.SENSORS AND ACTUATORS A-PHYSICAL,286,123-132.
MLA	Zeji Chen ; Fengxiang Wang ; Quan Yuan ; Xiao Kan ; Jinling Yang ; Jicong Zhao ; Fuhua Yang."3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity".SENSORS AND ACTUATORS A-PHYSICAL 286(2019):123-132.