Ultra-precision grinding of AlON ceramics: Surface finish and mechanisms

doi:10.1016/j.jeurceramsoc.2019.05.005

	Ultra-precision grinding of AlON ceramics: Surface finish and mechanisms
	Zhang, Chunyu; Guo, Bing; Zhao, Qingliang; Liu, Han; Wang, Jinhu; Zhang, Jian
刊名	JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
	2019-10-01
卷号	39 期号:13 页码:3668
关键词	Aluminum oxynitride Ultra-precision grinding Non-uniform morphology Grain orientation Material removal mode
ISSN号	0955-2219
DOI	10.1016/j.jeurceramsoc.2019.05.005
文献子类	Article
英文摘要	Aluminum oxynitride (AlON) can be effectively finished by ultra-precision grinding. In this work, the ultra precision grinding experiment was conducted on AlON to investigate surface characteristics and material removal mechanism. The ground surface has an unusual non-uniform morphology resulted from the different material removal modes. Grazing incidence X-ray diffraction (GIXRD), nanoindentation and Electron Back Scattered Diffraction (EBSD) were carried out to study the micro-properties of AlON. The results revealed that the micro mechanical properties vary with the grain orientation on the surface. The morphologies of ground surface are consistent in the twinned grains and change with the grain orientation. By comparing the relationship of machining size and grain size, the material removal modes of individual grains should be taken into consideration during ultra-precision grinding. Based on this, a simple theoretical model was proposed to explain the material removal mechanism of AlON under ultra-precision grinding.
WOS研究方向	Materials Science
语种	英语
出版者	ELSEVIER SCI LTD
内容类型	期刊论文
源URL	[http://ir.sic.ac.cn/handle/331005/26812]
专题	中国科学院上海硅酸盐研究所
推荐引用方式 GB/T 7714	Zhang, Chunyu,Guo, Bing,Zhao, Qingliang,et al. Ultra-precision grinding of AlON ceramics: Surface finish and mechanisms[J]. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY,2019,39(13):3668.
APA	Zhang, Chunyu,Guo, Bing,Zhao, Qingliang,Liu, Han,Wang, Jinhu,&Zhang, Jian.(2019).Ultra-precision grinding of AlON ceramics: Surface finish and mechanisms.JOURNAL OF THE EUROPEAN CERAMIC SOCIETY,39(13),3668.
MLA	Zhang, Chunyu,et al."Ultra-precision grinding of AlON ceramics: Surface finish and mechanisms".JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 39.13(2019):3668.