AFM nanomanipulation with tip morphology estimation and positioning compensation

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	AFM nanomanipulation with tip morphology estimation and positioning compensation
	Hou J(侯静)5; Wu CD(吴成东)4; Wang ZD(王志东)3; Yuan S(袁帅)4; Yu P(于鹏)2 ; Liu, Tao1
	2019
会议日期	April 1-14, 2019
会议地点	Bangkok, Thailand
关键词	AFM tip morphology estimation tip positioning position compensation nanomanipulation
页码	534-539
英文摘要	During the AFM nanomanipulation, the uncertainty of AFM tip morphology and its location seriously affect the reliability of the nanomanipulation results. In response to this problem, we first estimate the tip morphology and reconstruct the scanned image. Based on this, the position and orientation of the interaction between AFM tip morphology and nanoparticle morphology are calculated. The simulation results show that the effect of the tip on the nanoparticle depends on the angle θ between the direction of the tip's pushing direction and its actual force. The smaller the angle θ is, the more effective the distance is. Due to the uncertainty of the position of the tip, the minimum angle θ can't be guaranteed, resulting in unstable results. Therefore, this study refers to the macro robot positioning strategy, using local scanning method to improve the positioning accuracy of the tip relative to the nanoparticles. According to the table of the tip pushing position and the deviation angle θ, the tip pushing position is compensated, which ensures that the deviation angle θ is minimum. Finally, the experimental results of constructing nanostructures verify the effectiveness of the proposed method. This is of great importance to the application of AFM nanomanipulation in Mems / Nems device assembly.
产权排序	4
会议录	Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019
会议录出版者	IEEE
会议录出版地	New York
语种	英语
ISBN号	978-1-7281-1629-7
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/26140]
专题	沈阳自动化研究所_机器人学研究室
通讯作者	Hou J(侯静)
作者单位	1.Shenyang Institute of Science and Technology, Shenyang, China 2.Chinese Academy of Sciences, Shenyang Institute of Automation, Shenyang, China 3.Chiba Institute of Technology, Advanced Robotics, Chiba, Japan 4.Northeastern University, Information Science and Engineering, Shenyang, China 5.Shenyang Jianzhu University, Information and Control Engineering, Shenyang, China
推荐引用方式 GB/T 7714	Hou J,Wu CD,Wang ZD,et al. AFM nanomanipulation with tip morphology estimation and positioning compensation[C]. 见:. Bangkok, Thailand. April 1-14, 2019.