Effect of heat treatment on structure and properties of molybdenum nitride and molybdenum carbonitride films prepared by magnetron sputtering

doi:10.1016/j.surfcoat.2019.06.062

CORC > 宁波材料技术与工程研究所 > 中国科学院宁波材料技术与工程研究所 > 2019专题

	Effect of heat treatment on structure and properties of molybdenum nitride and molybdenum carbonitride films prepared by magnetron sputtering
	Qian, Jianguo ; Li, Shuxin ; Pu, Jibin ; Cai, Zhaobing ; Wang, Haixin ; Cai, Qun ; Ju, Pengfei
刊名	SURFACE & COATINGS TECHNOLOGY
	2019
卷号	374 页码:725-735
关键词	CHEMICAL-VAPOR-DEPOSITION CR-C-N MECHANICAL-PROPERTIES THIN-FILMS MO-N TRIBOLOGICAL PERFORMANCE HARD COATINGS MICROSTRUCTURE TEMPERATURE FRICTION
DOI	10.1016/j.surfcoat.2019.06.062
英文摘要	Effect of heat treatment on structure and properties of molybdenum nitride and molybdenum carbonitride films prepared by magnetron sputtering
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/17962]
专题	2019专题
作者单位	1.Cai, ZB (reprint author), Chinese Acad Sci, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China. 2.Pu, JB
推荐引用方式 GB/T 7714	Qian, Jianguo,Li, Shuxin,Pu, Jibin,et al. Effect of heat treatment on structure and properties of molybdenum nitride and molybdenum carbonitride films prepared by magnetron sputtering[J]. SURFACE & COATINGS TECHNOLOGY,2019,374:725-735.
APA	Qian, Jianguo.,Li, Shuxin.,Pu, Jibin.,Cai, Zhaobing.,Wang, Haixin.,...&Ju, Pengfei.(2019).Effect of heat treatment on structure and properties of molybdenum nitride and molybdenum carbonitride films prepared by magnetron sputtering.SURFACE & COATINGS TECHNOLOGY,374,725-735.
MLA	Qian, Jianguo,et al."Effect of heat treatment on structure and properties of molybdenum nitride and molybdenum carbonitride films prepared by magnetron sputtering".SURFACE & COATINGS TECHNOLOGY 374(2019):725-735.