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	Methods of making optical waveguide structures by way of molecular beam epitaxy
	KUMARAN, RAVEEN; PENSON, SHAWN; ROBIN, IVAN-CHRISTOPHE; TIEDJE, THOMAS; WEBSTER, SCOTT; ABDELMOUNAIME FAOUYZI, ZERROUK
	2008-04-24
著作权人	ZECOTEK MEDICAL SYSTEMS INC.
专利号	WO2008047240A3
国家	世界知识产权组织
文献子类	发明申请
其他题名	Methods of making optical waveguide structures by way of molecular beam epitaxy
英文摘要	The invention relates to methods of making optical waveguide structures by way of molecular beam epitaxy (MBE). The method comprises the steps of: (1) providing a single crystal substrate in an ultra-high vacuum (UHV) environment, wherein the single crystal substrate has a first index of refraction; (2) heating the single crystal substrate; (3) depositing an epitaxial oxide layer having a rare-earth dopant and a second index of refraction on the single crystal substrate, wherein the epitaxial oxide layer is deposited by way of at least first, second, and third molecular beam fluxes; and (4) depositing a cladding layer on the single crystal oxide layer, wherein the cladding layer has a third index of refraction that is the same or about the same as the first index of refraction of the single crystal substrate, and wherein the second index of refraction is greater than the first and third indexes of refraction.
公开日期	2008-04-24
申请日期	2007-09-21
状态	未确认
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/73713]
专题	半导体激光器专利数据库
作者单位	ZECOTEK MEDICAL SYSTEMS INC.
推荐引用方式 GB/T 7714	KUMARAN, RAVEEN,PENSON, SHAWN,ROBIN, IVAN-CHRISTOPHE,et al. Methods of making optical waveguide structures by way of molecular beam epitaxy. WO2008047240A3. 2008-04-24.

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