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	Tunable Fabry-Perot microelectromechanical resonator with optical power-dependent tuning
	TUCKER, RODNEY S.; SORIN, WAYNE V.
	2002-05-08
著作权人	AGILENT TECHNOLOGIES, INC. (A DELAWARE CORPORATION)
专利号	EP1204181A2
国家	欧洲专利局
文献子类	发明申请
其他题名	Tunable Fabry-Perot microelectromechanical resonator with optical power-dependent tuning
英文摘要	A tunable optical resonator[100] constructed from a fixed mirror[14] and a moveable mirror[13]. The fixed mirror[14] is attached to a substrate having a first electrically conducting surface. A support member[15-18] having the moveable mirror[13] supported thereon and a second electrically conducting surface is suspended above the substrate such that the moveable mirror[13] is separated from the fixed mirror[14]. A light output port[13] transmits a light signal of a wavelength determined by the distance between the fixed and moveable mirrors[13]. An optical circuit[102,104] measures the power level of the light signal and generates an electrical signal that depends on the measured power level. A frequency adjustment circuit[106,120], responsive to the electrical signal and a tuning voltage, applies an electrical potential between the first and second electrically conducting surfaces. The electrical potential causes the distance to remain at a distance determined by the tuning voltage independent of the power level for power levels less than a predetermined power level.
公开日期	2002-05-08
申请日期	2001-07-11
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/62469]
专题	半导体激光器专利数据库
作者单位	AGILENT TECHNOLOGIES, INC. (A DELAWARE CORPORATION)
推荐引用方式 GB/T 7714	TUCKER, RODNEY S.,SORIN, WAYNE V.. Tunable Fabry-Perot microelectromechanical resonator with optical power-dependent tuning. EP1204181A2. 2002-05-08.

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