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	Gas supply path structure, gas supply method, laser oscillating apparatus, exposure apparatus, and device production method
	OHMI, TADAHIRO; OSAWA, HIROSHI; INO, KAZUHIDE; SHIRAI, YASUYUKI; TANAKA, NOBUYOSHI; SHINOHARA, TOSHIKUNI; HIRAYAMA, MASAKI
	2000-05-03
著作权人	TADAHIRO OHMI
专利号	EP0997225A1
国家	欧洲专利局
文献子类	发明申请
其他题名	Gas supply path structure, gas supply method, laser oscillating apparatus, exposure apparatus, and device production method
英文摘要	A gas supply path structure forms a fluid path for allowing a laser gas to flow into or out of a pair of fluid inlet and outlet 11a and a laser gas is controlled to a predetermined subsonic speed at a throat portion. Gas supplies for controlling the speed of the gas are connected each to the fluid inlet and to the fluid outlet of the gas supply path structure and, together with a cooling device, compose a circulation system for controlling the speed and pressure of the laser gas at the fluid inlet and/or at the fluid outlet.
公开日期	2000-05-03
申请日期	1999-10-28
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/60326]
专题	半导体激光器专利数据库
作者单位	TADAHIRO OHMI
推荐引用方式 GB/T 7714	OHMI, TADAHIRO,OSAWA, HIROSHI,INO, KAZUHIDE,et al. Gas supply path structure, gas supply method, laser oscillating apparatus, exposure apparatus, and device production method. EP0997225A1. 2000-05-03.

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