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	Photonics Fabrication Process Performance Improvement
	WATTS, MICHAEL ROBERT; MOSS, BENJAMIN ROY; SHAH HOSSEINI, EHSAN; POULTON, CHRISTOPHER; RUSSO, PETER NICHOLAS
	2019-08-08
著作权人	ANALOG PHOTONICS LLC
专利号	US20190243081A1
国家	美国
文献子类	发明申请
其他题名	Photonics Fabrication Process Performance Improvement
英文摘要	A plurality of waveguide structures are formed in at least one silicon layer of a first member. The first member includes: a first surface of a first silicon dioxide layer that is attached to a second member that consists essentially of an optically transmissive material having a thermal conductivity less than about 50 W/(m·K), and a second surface of material that was deposited over at least some of the plurality of waveguide structures. An array of phase shifters is formed in one or more layers of the first member. An array of temperature controlling elements are in proximity to the array of phase shifters.
公开日期	2019-08-08
申请日期	2019-04-16
状态	申请中
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/57784]
专题	半导体激光器专利数据库
作者单位	ANALOG PHOTONICS LLC
推荐引用方式 GB/T 7714	WATTS, MICHAEL ROBERT,MOSS, BENJAMIN ROY,SHAH HOSSEINI, EHSAN,et al. Photonics Fabrication Process Performance Improvement. US20190243081A1. 2019-08-08.

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