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	Method for manufacturing optical coupling element, optical transmission substrate, optical coupling component, coupling method, and optical interconnect system
	NAKAGAWA, SHIGERU; NUMATA, HIDETOSHI; SUEOKA, KUNIAKI; TAIRA, YOICHI
	2012-10-25
著作权人	INTERNATIONAL BUSINESS MACHINES CORPORATION
专利号	US20120267338A1
国家	美国
文献子类	发明申请
其他题名	Method for manufacturing optical coupling element, optical transmission substrate, optical coupling component, coupling method, and optical interconnect system
英文摘要	An optical coupling structure that interfaces between optical devices mounted on a substrate and optical waveguides formed in the substrate. A manufacturing method includes preparing a wafer formed on an inorganic solid material on a dicing tape and cutting the back surface of the wafer to form substantially angled portions using a dicing blade having a point angle. The dicing tape is stripped from the wafer and the wafer is separated at the valleys between the substantially angled portions to obtain an optical coupling element. The obtained optical coupling element is a three-dimensional polyhedral light-reflecting member having a mirror surface corresponding to a surface of the wafer. The obtained optical coupling element is inserted into a trench that opens, substantially perpendicular to an optical waveguide of an optical transmission substrate, in the main surface of the optical transmission substrate to provide a structure for optical coupling with the outside.
公开日期	2012-10-25
申请日期	2012-06-26
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/54349]
专题	半导体激光器专利数据库
作者单位	INTERNATIONAL BUSINESS MACHINES CORPORATION
推荐引用方式 GB/T 7714	NAKAGAWA, SHIGERU,NUMATA, HIDETOSHI,SUEOKA, KUNIAKI,et al. Method for manufacturing optical coupling element, optical transmission substrate, optical coupling component, coupling method, and optical interconnect system. US20120267338A1. 2012-10-25.

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