| Laser oscillating apparatus, exposure apparatus using the same and device fabrication method | |
| OHMI, TADAHIRO; SUZUKI, NOBUMASA; OHSAWA, HIROSHI; TANAKA, NOBUYOSHI; SHINOHARA, TOSHIKUNI; HIRAYAMA, MASAKI | |
| 2004-12-07 | |
| 著作权人 | CANON KABUSHIKI KAISHA |
| 专利号 | US6829279 |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Laser oscillating apparatus, exposure apparatus using the same and device fabrication method |
| 英文摘要 | In a laser oscillating apparatus for exciting a laser gas in a laser tube by introducing an electromagnetic wave from a waveguide into the laser tube through a plurality of slots formed in a waveguide wall, and generating a laser beam by resonating light emitted from the laser gas, the slots are formed in a line such that their longitudinal direction is consistent with the longitudinal direction of the waveguide, and a metal wall is so formed as to surround these slots. This metal wall forms a gap as a microwave passage from the slots to a window in the laser tube wall, thereby spacing the laser tube wall apart from the slots by a predetermined distance. |
| 公开日期 | 2004-12-07 |
| 申请日期 | 2000-02-01 |
| 状态 | 授权 |
| 内容类型 | 专利 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/47643]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | CANON KABUSHIKI KAISHA |
| 推荐引用方式 GB/T 7714 | OHMI, TADAHIRO,SUZUKI, NOBUMASA,OHSAWA, HIROSHI,et al. Laser oscillating apparatus, exposure apparatus using the same and device fabrication method. US6829279. 2004-12-07. |
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