Flared and tapered rib waveguide semiconductor laser and method for making same | |
COLEMAN, JAMES J.; ZEDIKER, MARK S. | |
2001-11-13 | |
著作权人 | NUVONYX, INC. |
专利号 | US6317445 |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Flared and tapered rib waveguide semiconductor laser and method for making same |
英文摘要 | A semiconductor laser structure based upon a rib waveguide geometry which includes a uniform region and a flared and tapered region. The uniform region has a generally constant thickness and width. The flared tapered region gradually increases in width and decreases in thickness from the uniform region to a wide end. Fabrication is by selective area epitaxy with dielectric stripes in a dual stripe dielectric mask used to defined the two dimensional varying flare in the waveguide changing in thickness as a function of the flare width. |
公开日期 | 2001-11-13 |
申请日期 | 2000-04-11 |
状态 | 授权 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/46253] |
专题 | 半导体激光器专利数据库 |
作者单位 | NUVONYX, INC. |
推荐引用方式 GB/T 7714 | COLEMAN, JAMES J.,ZEDIKER, MARK S.. Flared and tapered rib waveguide semiconductor laser and method for making same. US6317445. 2001-11-13. |
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