Flared and tapered rib waveguide semiconductor laser and method for making same
COLEMAN, JAMES J.; ZEDIKER, MARK S.
2001-11-13
著作权人NUVONYX, INC.
专利号US6317445
国家美国
文献子类授权发明
其他题名Flared and tapered rib waveguide semiconductor laser and method for making same
英文摘要A semiconductor laser structure based upon a rib waveguide geometry which includes a uniform region and a flared and tapered region. The uniform region has a generally constant thickness and width. The flared tapered region gradually increases in width and decreases in thickness from the uniform region to a wide end. Fabrication is by selective area epitaxy with dielectric stripes in a dual stripe dielectric mask used to defined the two dimensional varying flare in the waveguide changing in thickness as a function of the flare width.
公开日期2001-11-13
申请日期2000-04-11
状态授权
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/46253]  
专题半导体激光器专利数据库
作者单位NUVONYX, INC.
推荐引用方式
GB/T 7714
COLEMAN, JAMES J.,ZEDIKER, MARK S.. Flared and tapered rib waveguide semiconductor laser and method for making same. US6317445. 2001-11-13.
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