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	Semiconductor devices based on coalesced nano-rod arrays
	MISHRA, UMESH KUMAR; KELLER, STACIA
著作权人	REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
专利号	US20060223211A1
国家	美国
文献子类	发明申请
其他题名	Semiconductor devices based on coalesced nano-rod arrays
英文摘要	Semiconductor devices are fabricated using semiconductor nano-rod arrays, which are merged through coalescence into a continuous planar layer after the nano-rods in the nano-rod array are fabricated by growth or etching. Merging of the nano-rods through coalescence into a continuous layer is achieved by tuning the growth conditions into a regime allowing epitaxial lateral overgrowth.
公开日期	2006-10-05
申请日期	2005-12-02
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/43520]
专题	半导体激光器专利数据库
作者单位	REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
推荐引用方式 GB/T 7714	MISHRA, UMESH KUMAR,KELLER, STACIA. Semiconductor devices based on coalesced nano-rod arrays. US20060223211A1.

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