Self-alignment of microchips using surface tension and solid edge. | |
Yeh,J.Andrew; Hsieh,C.Max; Tsai,C.Gary | |
刊名 | Sensors and Actuators. A: Physical |
2007 | |
卷号 | Vol.139 No.1-2页码:343-349 |
关键词 | SURFACE tension INTEGRATED circuits INFORMATION technology ELECTRONIC packaging |
ISSN号 | 0924-4247 |
URL标识 | 查看原文 |
公开日期 | [db:dc_date_available] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/6763542 |
专题 | 上海电子信息职业技术学院 |
作者单位 | 1 Institute of Microelectromechanical System, National Tsing Hua University, Hsinchu, Taiwan, ROC 2 Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, Taiwan, ROC |
推荐引用方式 GB/T 7714 | Yeh,J.Andrew,Hsieh,C.Max,Tsai,C.Gary. Self-alignment of microchips using surface tension and solid edge.[J]. Sensors and Actuators. A: Physical,2007,Vol.139 No.1-2:343-349. |
APA | Yeh,J.Andrew,Hsieh,C.Max,&Tsai,C.Gary.(2007).Self-alignment of microchips using surface tension and solid edge..Sensors and Actuators. A: Physical,Vol.139 No.1-2,343-349. |
MLA | Yeh,J.Andrew,et al."Self-alignment of microchips using surface tension and solid edge.".Sensors and Actuators. A: Physical Vol.139 No.1-2(2007):343-349. |
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