Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure

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	Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure
	Zhang YX (Zhang Yun-Xiao) ; Pan JQ (Pan Jiao-Qing) ; Zhao LJ (Zhao Ling-Juan) ; Zhu HL (Zhu Hong-Liang) ; Wang W (Wang Wei)
刊名	chinese physics letters, 27 (2): art. no. 028501 feb 2010
	2010
卷号	27 期号:2 页码:art. no. 028501
关键词	I-N PHOTODIODE HIGH RESPONSIVITY HIGH-SPEED OPTIMIZATION FABRICATION
通讯作者	zhang, yx, chinese acad sci, inst semicond, key lab semicond mat sci, beijing 100083, peoples r china. e-mail address: zhangyx@semi.ac.cn
合作状况	其它
英文摘要	a new evanescently coupled uni-traveling carrier photodiode (ec-utc-pd) is designed, fabricated and characterized, which incorporates a multimode diluted waveguide structure and utc active waveguide structure together. a high responsivity of 0.68a/w at 1.55-mu m without an anti-reflection coating, a linear photocurrent responsivity of more than 21 ma, and a large-1 db vertical alignment tolerance of 2.5 mu m are achieved.; submitted by 阎军 (yanj@red.semi.ac.cn) on 2010-04-13t14:30:31z no. of bitstreams: 1 design and characterization of evanescently coupled uni-traveling carrier photodiodes with a multimode diluted waveguide structure.pdf: 666750 bytes, checksum: bf34bf9ed6c43203c45f048fccbc9f17 (md5); approved for entry into archive by 阎军(yanj@red.semi.ac.cn) on 2010-04-13t14:31:32z (gmt) no. of bitstreams: 1 design and characterization of evanescently coupled uni-traveling carrier photodiodes with a multimode diluted waveguide structure.pdf: 666750 bytes, checksum: bf34bf9ed6c43203c45f048fccbc9f17 (md5); made available in dspace on 2010-04-13t14:31:32z (gmt). no. of bitstreams: 1 design and characterization of evanescently coupled uni-traveling carrier photodiodes with a multimode diluted waveguide structure.pdf: 666750 bytes, checksum: bf34bf9ed6c43203c45f048fccbc9f17 (md5) previous issue date: 2010; national high-tech research and development program of china 2007aa03z417 2006aa01z256 2007aa03z419； national key basic research program of china 2006cb604901 2006cb604902; 其它
学科主题	半导体材料
收录类别	SCI
资助信息	national high-tech research and development program of china 2007aa03z417 2006aa01z256 2007aa03z419； national key basic research program of china 2006cb604901 2006cb604902
语种	英语
公开日期	2010-04-13
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/11157]
专题	半导体研究所_中科院半导体材料科学重点实验室
推荐引用方式 GB/T 7714	Zhang YX ,Pan JQ ,Zhao LJ ,et al. Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure[J]. chinese physics letters, 27 (2): art. no. 028501 feb 2010,2010,27(2):art. no. 028501.
APA	Zhang YX ,Pan JQ ,Zhao LJ ,Zhu HL ,&Wang W .(2010).Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure.chinese physics letters, 27 (2): art. no. 028501 feb 2010,27(2),art. no. 028501.
MLA	Zhang YX ,et al."Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure".chinese physics letters, 27 (2): art. no. 028501 feb 2010 27.2(2010):art. no. 028501.