Photoluminescence and Raman scattering correlated study of boron-doped silicon nanowires | |
Zeng, XB ; Liao, XB ; Dai, ST ; Wang, B ; Xu, YY ; Xiang, XB ; Hu, ZH ; Diao, HW ; Kong, GL | |
2005 | |
会议名称 | icmat symposium on science and technologies of nanomaterials |
会议日期 | dec 07-12, 2003 |
会议地点 | singapore, singapore |
关键词 | chemical vapor deposition processes nanomaterials semiconducting silicon VISIBLE PHOTOLUMINESCENCE POROUS SILICON AMORPHOUS-SILICON SI SPECTROSCOPY FILMS NANOSTRUCTURES CONFINEMENT GROWTH |
页码 | 23: 137-140 |
通讯作者 | zeng, xb, chinese acad sci, inst semicond, state key lab surface phys, beijing 100083, peoples r china. |
中文摘要 | boron-doped (b-doped) silicon nanowires (sinws) have been prepared and characterized by raman scattering and photoluminescence (pl). b-doped sinws were grown by plasma enhanced chemical vapor deposition (pecvd), using diborane (b2h6) as the dopant gas. raman spectra show a band at 480cm(-1),which is attributed to amorphous silicon. photoluminescence at room temperature exhibits three distinct emission peaks at 1.34ev, 1.42ev, 1.47ev. possible reason for these is suggested. |
英文摘要 | boron-doped (b-doped) silicon nanowires (sinws) have been prepared and characterized by raman scattering and photoluminescence (pl). b-doped sinws were grown by plasma enhanced chemical vapor deposition (pecvd), using diborane (b2h6) as the dopant gas. raman spectra show a band at 480cm(-1),which is attributed to amorphous silicon. photoluminescence at room temperature exhibits three distinct emission peaks at 1.34ev, 1.42ev, 1.47ev. possible reason for these is suggested.; zhangdi于2010-03-29批量导入; made available in dspace on 2010-03-29t06:06:35z (gmt). no. of bitstreams: 1 2442.pdf: 914364 bytes, checksum: 6dbf40db5c91b6904843bebc57d66ce0 (md5) previous issue date: 2005; nus, mat engn initiat, fac engn.; nus nanosci & nanotechnol initiat.; chinese acad sci, inst semicond, state key lab surface phys, beijing 100083, peoples r china |
收录类别 | CPCI-S |
会议主办者 | nus, mat engn initiat, fac engn.; nus nanosci & nanotechnol initiat. |
会议录 | science and technology of nanomaterials - icmat 2003丛书标题: journal of metastable and nanocrystalline materials series |
会议录出版者 | trans tech publications ltd ; laublsrutistr 24, ch-8717 stafa-zurich, switzerland |
会议录出版地 | laublsrutistr 24, ch-8717 stafa-zurich, switzerland |
学科主题 | 半导体材料 |
语种 | 英语 |
ISSN号 | 1422-6375 |
ISBN号 | 0-87849-953-9 |
内容类型 | 会议论文 |
源URL | [http://ir.semi.ac.cn/handle/172111/10118] |
专题 | 半导体研究所_中国科学院半导体研究所(2009年前) |
推荐引用方式 GB/T 7714 | Zeng, XB,Liao, XB,Dai, ST,et al. Photoluminescence and Raman scattering correlated study of boron-doped silicon nanowires[C]. 见:icmat symposium on science and technologies of nanomaterials. singapore, singapore. dec 07-12, 2003. |
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