Synthesis of GaN nanorods with vertebra-like morphology

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	Synthesis of GaN nanorods with vertebra-like morphology
	Gao, HY (Gao, Haiyong) ; Li, JM (Li, Jinmin)
	2006
会议名称	ieee international conference of nano/micro engineered and molecular systems
会议日期	jan 18-21, 2006
会议地点	zhuhai, peoples r china
关键词	GaN nanorods Ga2O3/ZnO films nitritding morphology CHEMICAL-VAPOR-DEPOSITION FILMS
页码	vols 1-3: 196-199
通讯作者	gao, hy, chinese acad sci, inst semicond, novel mat dept, beijing 100083, peoples r china.
中文摘要	gan nanorods with vertebra-like morphology were synthesized by nitriding ga2o3/zno films at 1000 degrees c for 20min. ga2o3 thin films and zno middle layers were pre-deposited in turn on si(111) substrates by r.f. magnetron sputtering system. in the flowing ammonia ambient, zno was reducted to zn and zu sublimated at 1000 degrees c. ga2o3 was reducted to ga2o and ga2o reacted with nh3 to synthesize gan nanorods in the help of the sublimation of zn. the structure and morphology of the nanorods were studied by x-ray diffraction (xrd) and scanning electron microscopy (sem), the composition of gan nanorods was studied by energy dispersive spectroscopy (eds) and fourier transform infrared (ftir) system.
英文摘要	gan nanorods with vertebra-like morphology were synthesized by nitriding ga2o3/zno films at 1000 degrees c for 20min. ga2o3 thin films and zno middle layers were pre-deposited in turn on si(111) substrates by r.f. magnetron sputtering system. in the flowing ammonia ambient, zno was reducted to zn and zu sublimated at 1000 degrees c. ga2o3 was reducted to ga2o and ga2o reacted with nh3 to synthesize gan nanorods in the help of the sublimation of zn. the structure and morphology of the nanorods were studied by x-ray diffraction (xrd) and scanning electron microscopy (sem), the composition of gan nanorods was studied by energy dispersive spectroscopy (eds) and fourier transform infrared (ftir) system.; zhangdi于2010-03-29批量导入; made available in dspace on 2010-03-29t06:06:08z (gmt). no. of bitstreams: 1 2263.pdf: 4066462 bytes, checksum: 1c7ad0dfa63549767a2bc3ab403d6381 (md5) previous issue date: 2006; ieee.; chinese acad sci, inst semicond, novel mat dept, beijing 100083, peoples r china
收录类别	CPCI-S
会议主办者	ieee.
会议录	2006 1st ieee international conference on nano/micro engineered and molecular systems
会议录出版者	ieee ; 345 e 47th st, new york, ny 10017 usa
会议录出版地	345 e 47th st, new york, ny 10017 usa
学科主题	半导体材料
语种	英语
ISBN号	978-1-4244-0139-0
内容类型	会议论文
源URL	[http://ir.semi.ac.cn/handle/172111/9824]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Gao, HY ,Li, JM . Synthesis of GaN nanorods with vertebra-like morphology[C]. 见:ieee international conference of nano/micro engineered and molecular systems. zhuhai, peoples r china. jan 18-21, 2006.