Ultra-compact silicon-on-insulator optical filter based on sidewall Bragg grating

CORC > 半导体研究所 > 中国科学院半导体研究所 > 中国科学院半导体研究所（2009年前）

	Ultra-compact silicon-on-insulator optical filter based on sidewall Bragg grating
	Tu XG ; Chen SW ; Yu JZ ; Wang QM ; Chin MK
	2008
会议名称	ieee photonicsglobal at singapore
会议日期	dec 08-11, 2008
会议地点	singapore, singapore
关键词	WAVE-GUIDES
页码	vols 1 and 2: 31-34
通讯作者	tu, xg, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china.
中文摘要	micro-cavity structure composed of silicon wire with 240nm square cross section and two symmetrical sidewall waveguide bragg gratings is fabricated and studied for the operation under telecommunication wavelengths. optical filter of quasi-te mode was realized based on this cavity. in such micro-cavity, optical quality factor (q) was measured up to 380 with a 4.8nm free spectral range (fsr) and 12db fringe contrast (fc). the measured group index of silicon waveguide with only 240nm square cross section was between 3.80 and 5.43. it is the first time group delay of silicon wire waveguide with such small core dimension is studied. larger group delay can be expected after optimizing the design parameters and the fabrication process.
英文摘要	micro-cavity structure composed of silicon wire with 240nm square cross section and two symmetrical sidewall waveguide bragg gratings is fabricated and studied for the operation under telecommunication wavelengths. optical filter of quasi-te mode was realized based on this cavity. in such micro-cavity, optical quality factor (q) was measured up to 380 with a 4.8nm free spectral range (fsr) and 12db fringe contrast (fc). the measured group index of silicon waveguide with only 240nm square cross section was between 3.80 and 5.43. it is the first time group delay of silicon wire waveguide with such small core dimension is studied. larger group delay can be expected after optimizing the design parameters and the fabrication process.; zhangdi于2010-03-09批量导入; zhangdi于2010-03-09批量导入; ieee.; [tu, xiaoguang; chen, shaowu; yu, jinzhong; wang, qiming] chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china
收录类别	其他
会议主办者	ieee.
会议录	2008 ieee photonicsglobal@singapore (ipgc)
会议录出版者	ieee ; 345 e 47th st, new york, ny 10017 usa
会议录出版地	345 e 47th st, new york, ny 10017 usa
学科主题	光电子学
语种	英语
ISBN号	978-1-4244-3901-0
内容类型	会议论文
源URL	[http://ir.semi.ac.cn/handle/172111/8256]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Tu XG,Chen SW,Yu JZ,et al. Ultra-compact silicon-on-insulator optical filter based on sidewall Bragg grating[C]. 见:ieee photonicsglobal at singapore. singapore, singapore. dec 08-11, 2008.