Realization of SOI submicrometer optical waveguide components - art. no. 68380L

CORC > 半导体研究所 > 中国科学院半导体研究所 > 中国科学院半导体研究所（2009年前）

	Realization of SOI submicrometer optical waveguide components - art. no. 68380L
	Xu XJ ; Chen SW ; Yu JZ ; Tu XG
	2008
会议名称	2nd conference on optoelectronic devices and integration
会议日期	nov 12-15, 2007
会议地点	beijing, peoples r china
关键词	silicon-on-insulator
页码	6838: l8380-l8380
通讯作者	xu, xj, chinese acad sci, inst semicond, state key lab optoelect, pob 912, beijing 100083, peoples r china.
中文摘要	submicrometer channel and rib waveguides based on soi (silicon-on-insulator) have been designed and fabricated with electron-beam lithography and inductively coupled plasma dry etching. propagation loss of 8.39db/mm was measured using the cut-back method. based on these so-called nanowire waveguides, we have also demonstrated some functional components with small dimensions, including sharp 90 degrees bends with radius of a few micrometers, t-branches, directional couplers and multimode interferometer couplers.
英文摘要	submicrometer channel and rib waveguides based on soi (silicon-on-insulator) have been designed and fabricated with electron-beam lithography and inductively coupled plasma dry etching. propagation loss of 8.39db/mm was measured using the cut-back method. based on these so-called nanowire waveguides, we have also demonstrated some functional components with small dimensions, including sharp 90 degrees bends with radius of a few micrometers, t-branches, directional couplers and multimode interferometer couplers.; zhangdi于2010-03-09批量导入; zhangdi于2010-03-09批量导入; spie.; chinese opt soc.; [xu, xuejun; chen, shaowu; yu, jinzhong; tu, xiaoguang] chinese acad sci, inst semicond, state key lab optoelect, beijing 100083, peoples r china
收录类别	其他
会议主办者	spie.; chinese opt soc.
会议录	optoelectronic devices and integration ii
会议录出版者	spie-int soc optical engineering ; 1000 20th st, po box 10, bellingham, wa 98227-0010 usa
会议录出版地	1000 20th st, po box 10, bellingham, wa 98227-0010 usa
学科主题	光电子学
语种	英语
ISSN号	0277-786x
ISBN号	978-0-8194-7013-3
内容类型	会议论文
源URL	[http://ir.semi.ac.cn/handle/172111/7798]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Xu XJ,Chen SW,Yu JZ,et al. Realization of SOI submicrometer optical waveguide components - art. no. 68380L[C]. 见:2nd conference on optoelectronic devices and integration. beijing, peoples r china. nov 12-15, 2007.