| Transformation of Enhanced Glow Discharge Dynamics in Nitrogen Plasma Immersion Ion Implantation | |
| Lu, Qiuyuan; Li, Liuhe; Li, Penghui; Xu, Ruizhen; Fu, Ricky King-Yu; Chu, Paul K. | |
| 刊名 | IEEE TRANSACTIONS ON PLASMA SCIENCE
 |
| 2013 | |
| 卷号 | 41页码:553-558 |
| 关键词 | Glow discharge implantation current ionization plasma immersion ion implantation (PIII) voltage drop |
| ISSN号 | 0093-3813 |
| DOI | 10.1109/TPS.2013.2243131 |
| URL标识 | 查看原文 |
| 收录类别 | SCIE ; EI |
| WOS记录号 | WOS:000316205200020 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/6565672 |
| 专题 | 北京航空航天大学 |
| 推荐引用方式 GB/T 7714 | Lu, Qiuyuan,Li, Liuhe,Li, Penghui,et al. Transformation of Enhanced Glow Discharge Dynamics in Nitrogen Plasma Immersion Ion Implantation[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE,2013,41:553-558. |
| APA | Lu, Qiuyuan,Li, Liuhe,Li, Penghui,Xu, Ruizhen,Fu, Ricky King-Yu,&Chu, Paul K..(2013).Transformation of Enhanced Glow Discharge Dynamics in Nitrogen Plasma Immersion Ion Implantation.IEEE TRANSACTIONS ON PLASMA SCIENCE,41,553-558. |
| MLA | Lu, Qiuyuan,et al."Transformation of Enhanced Glow Discharge Dynamics in Nitrogen Plasma Immersion Ion Implantation".IEEE TRANSACTIONS ON PLASMA SCIENCE 41(2013):553-558. |
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