Indium doping effect on GaN in the initial growth stage
Han PD
刊名journal of electronic materials
2001
卷号30期号:8页码:977-979
关键词GaN indium doping initial growth stage morphology optical transmission photoluminescence VAPOR-PHASE EPITAXY BUFFER LAYER FILMS SAPPHIRE DEPOSITION
ISSN号0361-5235
通讯作者yuan hr,chinese acad sci,inst semicond,lab semicond mat sci,pob 912,beijing 100083,peoples r china.
中文摘要three minutes' growth was carried out to investigate the indium-doping effect on initially grown gan. indium-doped and undoped samples were grown by low-pressure metalorganic vapor phase epitaxy. atomic force microscope observation revealed that in-doping modified the morphology of the nuclei. indium-doping also enhanced wetting between the buffer and nuclei layers, which was also supported by optical transmission. photoluminescence suggested that indium-doping obviously enhanced band-edge related emission even in the nucleation stage. x-ray diffraction performed on samples grown for 20 minutes indicated improvement of the crystalline quality through indium-doping. the mechanism of the indium-doping effect was discussed.
学科主题半导体材料
收录类别SCI
语种英语
公开日期2010-08-12
内容类型期刊论文
源URL[http://ir.semi.ac.cn/handle/172111/12120]  
专题半导体研究所_中国科学院半导体研究所(2009年前)
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Han PD. Indium doping effect on GaN in the initial growth stage[J]. journal of electronic materials,2001,30(8):977-979.
APA Han PD.(2001).Indium doping effect on GaN in the initial growth stage.journal of electronic materials,30(8),977-979.
MLA Han PD."Indium doping effect on GaN in the initial growth stage".journal of electronic materials 30.8(2001):977-979.
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