Violet/blue emission from hydrogenated amorphous carbon films deposited from energetic CH3+ ions and ion bombardment

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	Violet/blue emission from hydrogenated amorphous carbon films deposited from energetic CH3+ ions and ion bombardment
	Liao MY ; Feng ZH ; Chai CL ; Yang SY ; Liu ZK ; Wang ZG
刊名	journal of applied physics
	2002
卷号	91 期号:4 页码:1891-1893
关键词	DIAMOND-LIKE GROWTH LUMINESCENCE PLASMA
ISSN号	0021-8979
通讯作者	liao my,chinese acad sci,inst semicond,lab semicond mat sci,beijing 100083,peoples r china.
中文摘要	considering the complexity of the general plasma techniques, pure single ch3+ ion beams were selected for the deposition of hydrogenated amorphous (a) carbon films with various ion energies and temperatures. photoluminescence (pl) measurements have been performed on the films and violet/blue emission has been observed. the violet/blue emission is attributed to the small size distribution of sp(2) clusters and is related to the intrinsic properties of ch3 terminals, which lead to a very high barrier for the photoexcited electrons. ion bombardment plays an important role in the pl behavior. this would provide further insight into the growth dynamics of a-c:h films. (c) 2002 american institute of physics.
学科主题	半导体物理
收录类别	SCI
语种	英语
公开日期	2010-08-12
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/11996]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Liao MY,Feng ZH,Chai CL,et al. Violet/blue emission from hydrogenated amorphous carbon films deposited from energetic CH3+ ions and ion bombardment[J]. journal of applied physics,2002,91(4):1891-1893.
APA	Liao MY,Feng ZH,Chai CL,Yang SY,Liu ZK,&Wang ZG.(2002).Violet/blue emission from hydrogenated amorphous carbon films deposited from energetic CH3+ ions and ion bombardment.journal of applied physics,91(4),1891-1893.
MLA	Liao MY,et al."Violet/blue emission from hydrogenated amorphous carbon films deposited from energetic CH3+ ions and ion bombardment".journal of applied physics 91.4(2002):1891-1893.