Selective-area MOCVD growth for distributed feedback lasers integrated with vertically tapered self-aligned waveguide

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	Selective-area MOCVD growth for distributed feedback lasers integrated with vertically tapered self-aligned waveguide
	Qiu WB ; Wang W ; Dong J ; Zhou F ; Zhang JY
刊名	journal of crystal growth
	2003
卷号	250 期号:3-4 页码:583-587
关键词	self-alignment spotsize converter tapered waveguide selective area growth distributed feeback lasers
ISSN号	0022-0248
通讯作者	qiu wb,chinese acad sci,inst semicond,natl ctr optoelect technol,pob 912,beijing 100083,peoples r china.
中文摘要	the growth pressure and mask width dependent thickness enhancement factors of selective-area mocvd. grow th were investigated in this article. a, high enhancement of 5.8 was obtained at 130 mbar with the mask width of 70 mum. mismatched ingaasp (-0.5%) at the maskless region which could ensure the material at butt-joint region to be matched to inp was successively grown by controlling the composition and mismatch modulation in the selective-area growth. the upper optical confinement layer and the butt-coupled tapered thickness waveguide were regrown simultaneously in separated confined heterostructure 1.55 gm distributed feedback laser, which not only offered the separated optimization of the active region and the integrated spotsize converter, but also reduced the difficulty of the butt-joint selective regrowth. a narrow beam of 9degrees and 12degrees in the vertical and horizontal directions, a low threshold current of 6.5 ma was fabricated by using this technique. (c) 2003 elsevier science b.v. all rights reserved.
学科主题	半导体材料
收录类别	SCI
语种	英语
公开日期	2010-08-12
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/11638]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Qiu WB,Wang W,Dong J,et al. Selective-area MOCVD growth for distributed feedback lasers integrated with vertically tapered self-aligned waveguide[J]. journal of crystal growth,2003,250(3-4):583-587.
APA	Qiu WB,Wang W,Dong J,Zhou F,&Zhang JY.(2003).Selective-area MOCVD growth for distributed feedback lasers integrated with vertically tapered self-aligned waveguide.journal of crystal growth,250(3-4),583-587.
MLA	Qiu WB,et al."Selective-area MOCVD growth for distributed feedback lasers integrated with vertically tapered self-aligned waveguide".journal of crystal growth 250.3-4(2003):583-587.