A novel implantable multichannel silicon-based microelectrode

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	A novel implantable multichannel silicon-based microelectrode
	Sui XH (Sui Xiao-Hong) ; Zhang RX (Zhang Ruo-Xin) ; Pei WH (Pei Wei-Hua) ; Chen HD (Chen Hong-Da)
刊名	chinese physics
	2007
卷号	16 期号:7 页码:2116-2119
关键词	MEMS
ISSN号	issn: 1009-1963
通讯作者	sui, xh, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: xhsui@mail.semi.ac.cn
中文摘要	silicon-based microelectrodes have been confirmed to be helpful in neural prostheses. the fabricated 7-channel silicon-based microelectrode was feasible to be implanted into the brain cortex. the manufacturing process by microelectromechanical system (mems) technology was detailed with four photolithographic masks. the microscopic photographs and sem images indicated that the probe shank was 3mm long, 100 mu m wide and 20 mu m thick with the recording sites spaced 120 mu m apart for good signal isolation. to facilitate the insertion and minimize the trauma, the microelectrode is narrowed down gradually near the tip with the tip taper angle of 6 degrees. curve of the single recording site impedance versus frequency was shown by test in vitro and the impedance declined from 150.5 k omega to 6.0 k omega with frequency changing from 10 k to 10mhz.
学科主题	光电子学
收录类别	SCI
语种	英语
公开日期	2010-03-29
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/9330]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Sui XH ,Zhang RX ,Pei WH ,et al. A novel implantable multichannel silicon-based microelectrode[J]. chinese physics,2007,16(7):2116-2119.
APA	Sui XH ,Zhang RX ,Pei WH ,&Chen HD .(2007).A novel implantable multichannel silicon-based microelectrode.chinese physics,16(7),2116-2119.
MLA	Sui XH ,et al."A novel implantable multichannel silicon-based microelectrode".chinese physics 16.7(2007):2116-2119.