Depth dependent elastic strain in ZnO epilayer: combined Rutherford backscattering/channeling and X-ray diffraction

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	Depth dependent elastic strain in ZnO epilayer: combined Rutherford backscattering/channeling and X-ray diffraction
	Feng ZX ; Yao SD ; Hou L ; Jin RQ
刊名	nuclear instruments & methods in physics research section b-beam interactions with materials and atoms
	2005
卷号	229 期号:2 页码:246-252
关键词	rutherford backscattering/channeling
ISSN号	0168-583x
通讯作者	feng, zx, mcgill univ, dept phys, 3600 univ st,rutherford bldg, montreal, pq h3a 2t8, canada. 电子邮箱地址: fengz@physics.mcgill.ca
中文摘要	a zno layer was grown by metalorganic chemical vapor deposition (mocvd) on a sapphire (0 0 0 1) substrate. the perpendicular and parallel elastic strain of the zno epilayer, e(perpendicular to) = 0.19%, e(parallel to) = -0.29%, respectively, were derived by using the combination of rutherford backscattering (rbs)/channeling and x-ray diffraction (xrd). the ratio vertical bar e(parallel to)/ e(perpendicular to)vertical bar = 1.5 indicates that zno layer is much stiffer in the a-axis direction than in the c-axis direction. by using rbs/c, the depth dependent elastic strain was deduced. the strain is higher at the depth close to the interface and decreases towards the surface. the negative tetragonal distortion was explained by considering the lattice mismatch and thermal mismatch in zno thin film. (c) 2004 elsevier b.v. all rights reserved.
学科主题	光电子学
收录类别	SCI
语种	英语
公开日期	2010-03-17
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/8842]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Feng ZX,Yao SD,Hou L,et al. Depth dependent elastic strain in ZnO epilayer: combined Rutherford backscattering/channeling and X-ray diffraction[J]. nuclear instruments & methods in physics research section b-beam interactions with materials and atoms,2005,229(2):246-252.
APA	Feng ZX,Yao SD,Hou L,&Jin RQ.(2005).Depth dependent elastic strain in ZnO epilayer: combined Rutherford backscattering/channeling and X-ray diffraction.nuclear instruments & methods in physics research section b-beam interactions with materials and atoms,229(2),246-252.
MLA	Feng ZX,et al."Depth dependent elastic strain in ZnO epilayer: combined Rutherford backscattering/channeling and X-ray diffraction".nuclear instruments & methods in physics research section b-beam interactions with materials and atoms 229.2(2005):246-252.