Research progresses of SOI optical waveguide devices and integrated optical switch matrix

CORC > 半导体研究所 > 中国科学院半导体研究所 > 中国科学院半导体研究所（2009年前）

	Research progresses of SOI optical waveguide devices and integrated optical switch matrix
	Yu JZ ; Chen SW ; Xia JS ; Wang ZT ; Fan ZC ; Li YP ; Liu JW ; Yang D ; Chen YY
刊名	science in china series f-information sciences
	2005
卷号	48 期号:2 页码:234-246
关键词	SOI (silicon-on-insulator)
ISSN号	1009-2757
通讯作者	yu, jz, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: jzyu@red.semi.ac.cn
中文摘要	soi (silicon-on-insulator) is a new material with a lot of important performances such as large index difference, low transmission loss. fabrication processes for soi based optoelectronic devices are compatible with conventional ic processes. having the potential of oeic monolithic integration, soi based optoelectronic devices have shown many good characteristics and become more and more attractive recently. in this paper, the recent progresses of soi waveguide devices in our research group are presented. by highly effective numerical simulation, the single mode conditions for soi rib waveguides with rectangular and trapezoidal cross-section were accurately investigated. using both chemical anisotropic wet etching and plasma dry etching techniques, soi single mode rib waveguide, mmi coupler, voa (variable optical attenuator), 2x2 thermal-optical switch were successfully designed and fabricated. based on these, 4x4 and 8x8 soi optical waveguide integrated switch matrixes are demonstrated for the first time.
学科主题	光电子学
收录类别	SCI
语种	英语
公开日期	2010-03-17
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/8720]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Yu JZ,Chen SW,Xia JS,et al. Research progresses of SOI optical waveguide devices and integrated optical switch matrix[J]. science in china series f-information sciences,2005,48(2):234-246.
APA	Yu JZ.,Chen SW.,Xia JS.,Wang ZT.,Fan ZC.,...&Chen YY.(2005).Research progresses of SOI optical waveguide devices and integrated optical switch matrix.science in china series f-information sciences,48(2),234-246.
MLA	Yu JZ,et al."Research progresses of SOI optical waveguide devices and integrated optical switch matrix".science in china series f-information sciences 48.2(2005):234-246.