Nucleation of diamond by pure carbon ion bombardment - a transmission electron microscopy study

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	Nucleation of diamond by pure carbon ion bombardment - a transmission electron microscopy study
	Yao, Y ; Liao, MY ; Wang, ZG ; Lifshitz, Y ; Lee, ST
刊名	applied physics letters
	2005
卷号	87 期号:6 页码:art.no.063103
关键词	BEAM DEPOSITION
ISSN号	0003-6951
通讯作者	lee, st, city univ hong kong, ctr super diamond & adv films cosdaf, hong kong, hong kong, peoples r china. 电子邮箱地址: apannale@cityu.edu.hk
中文摘要	a cross-sectional high-resolution transmission electron microscopy (hrtem) study of a film deposited by a 1 kev mass-selected carbon ion beam onto silicon held at 800 degrees c is presented. initially, a graphitic film with its basal planes perpendicular to the substrate is evolving. the precipitation of nanodiamond crystallites in upper layers is confirmed by hrtem, selected area electron diffraction, and electron energy loss spectroscopy. the nucleation of diamond on graphitic edges as predicted by lambrecht [w. r. l. lambrecht, c. h. lee, b. segall, j. c. angus, z. li, and m. sunkara, nature, 364 607 (1993)] is experimentally confirmed. the results are discussed in terms of our recent subplantation-based diamond nucleation model. (c) 2005 american institute of physics.
学科主题	半导体材料
收录类别	SCI
语种	英语
公开日期	2010-03-17
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/8606]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Yao, Y,Liao, MY,Wang, ZG,et al. Nucleation of diamond by pure carbon ion bombardment - a transmission electron microscopy study[J]. applied physics letters,2005,87(6):art.no.063103.
APA	Yao, Y,Liao, MY,Wang, ZG,Lifshitz, Y,&Lee, ST.(2005).Nucleation of diamond by pure carbon ion bombardment - a transmission electron microscopy study.applied physics letters,87(6),art.no.063103.
MLA	Yao, Y,et al."Nucleation of diamond by pure carbon ion bombardment - a transmission electron microscopy study".applied physics letters 87.6(2005):art.no.063103.