Multimode interference 3-dB coupler in silicon-on-insulator based on silicon rib waveguides with trapezoidal cross section

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	Multimode interference 3-dB coupler in silicon-on-insulator based on silicon rib waveguides with trapezoidal cross section
	Xia JS ; Yu JZ ; Fan ZC ; Wang ZT ; Chen SW
刊名	chinese physics letters
	2004
卷号	21 期号:1 页码:104-106
ISSN号	0256-307x
通讯作者	xia, js, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: jsxia@red.semi.ac.cn
中文摘要	a 3-db multimode interference optical coupler based on rib waveguides with trapezoidal cross section was designed and fabricated on silicon-on-insulator wafer. potassium hydroxide (koh) anisotropic chemical etching of silicon was used to fabricate the waveguides to obtain smooth interface. a modified finite-difference beam propagation method was used to simulate the multimode rib waveguide with slope interfaces. the rms roughness of etching interface is as small as 1.49 nm. the propagation loss of the waveguide is 1.3 db/cm at wavelength of 1.55 mum. the fabricated 3-db coupler has a good uniformity of 0.2 db.
学科主题	光电子学
收录类别	SCI
语种	英语
公开日期	2010-03-09
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/8200]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Xia JS,Yu JZ,Fan ZC,et al. Multimode interference 3-dB coupler in silicon-on-insulator based on silicon rib waveguides with trapezoidal cross section[J]. chinese physics letters,2004,21(1):104-106.
APA	Xia JS,Yu JZ,Fan ZC,Wang ZT,&Chen SW.(2004).Multimode interference 3-dB coupler in silicon-on-insulator based on silicon rib waveguides with trapezoidal cross section.chinese physics letters,21(1),104-106.
MLA	Xia JS,et al."Multimode interference 3-dB coupler in silicon-on-insulator based on silicon rib waveguides with trapezoidal cross section".chinese physics letters 21.1(2004):104-106.