Novel silicon-on-insulator grating couplers based on CMOS polysilicon gate layer

	Novel silicon-on-insulator grating couplers based on CMOS polysilicon gate layer
	Qiu, C ; Sheng, Z ; Li, L ; Pang, A ; Wu, AM（重点实验室） ; Du, JJ ; Chen, J ; Wang, X（重点实验室） ; Gan, FW ; Zou, SC（重点实验室）
刊名	OPTOELECTRONIC MATERIALS AND DEVICES VI
	2011
卷号	8308 页码:83081G
关键词	Engineering Electrical & Electronic Optics
ISSN号	0277-786X
学科主题	Engineering; Optics
收录类别	SCI
原文出处	10.1117/12.904183
语种	英语
公开日期	2013-05-10
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/115119]
专题	上海微系统与信息技术研究所_信息功能材料国家重点实验室2008-2012_期刊论文
推荐引用方式 GB/T 7714	Qiu, C,Sheng, Z,Li, L,et al. Novel silicon-on-insulator grating couplers based on CMOS polysilicon gate layer[J]. OPTOELECTRONIC MATERIALS AND DEVICES VI,2011,8308:83081G.
APA	Qiu, C.,Sheng, Z.,Li, L.,Pang, A.,Wu, AM.,...&Zou, SC.(2011).Novel silicon-on-insulator grating couplers based on CMOS polysilicon gate layer.OPTOELECTRONIC MATERIALS AND DEVICES VI,8308,83081G.
MLA	Qiu, C,et al."Novel silicon-on-insulator grating couplers based on CMOS polysilicon gate layer".OPTOELECTRONIC MATERIALS AND DEVICES VI 8308(2011):83081G.