Effects of crystalline quality on the ultraviolet emission and electrical properties of the ZnO films deposited by magnetron sputtering

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	Effects of crystalline quality on the ultraviolet emission and electrical properties of the ZnO films deposited by magnetron sputtering
	You JB; Zhang XW; Yin ZG; Fan YM
刊名	applied surface science
	2009
卷号	255 期号:11 页码:5876-5880
关键词	Crystal quality RF magnetron sputtering Zinc oxide Semiconducting II-VI materials
ISSN号	0169-4332
通讯作者	zhang xw chinese acad sci inst semicond key lab semicond mat sci a35 qinghua donglu beijing 100083 peoples r china. e-mail address: xwzhang@semi.ac.cn
中文摘要	the zno films were deposited on c-plane sapphire, si (0 0 1) and mgal2o4 (1 1 1) substrates in pure ar ambient at different substrate temperatures ranging from 400 to 750 degrees c by radio frequency magnetron sputtering. x-ray diffraction, photoluminescence and hall measurements were used to evaluate the growth temperature and the substrate effects on the properties of zno films. the results show that the crystalline quality of the zno films improves with increasing the temperature up to 600 degrees c, the crystallinity of the films is degraded as the growth temperature increasing further, and the zno film with the best crystalline quality is obtained on sapphire at 600 degrees c. the intensity of the photoluminescence and the electrical properties strongly depend on the crystalline quality of the zno films. the zno films with the better crystallinity have the stronger ultraviolet emission, the higher mobility and the lower residual carrier concentration. the effects of crystallinity on light emission and electrical properties, and the possible origin of the n-type conductivity of the undoped zno films are also discussed. (c) 2009 elsevier b. v. all rights reserved.
学科主题	半导体化学
收录类别	SCI
资助信息	hundred talents program chinese academy of sciences "863'' project of china 2006aa03z306 national natural science foundation of china 50601025 60876031this work was supported by the hundred talents program chinese academy of sciences, the "863'' project of china (2006aa03z306) and the national natural science foundation of china ( grant no. 50601025, 60876031).
语种	英语
公开日期	2010-03-08
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/7317]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	You JB,Zhang XW,Yin ZG,et al. Effects of crystalline quality on the ultraviolet emission and electrical properties of the ZnO films deposited by magnetron sputtering[J]. applied surface science,2009,255(11):5876-5880.
APA	You JB,Zhang XW,Yin ZG,&Fan YM.(2009).Effects of crystalline quality on the ultraviolet emission and electrical properties of the ZnO films deposited by magnetron sputtering.applied surface science,255(11),5876-5880.
MLA	You JB,et al."Effects of crystalline quality on the ultraviolet emission and electrical properties of the ZnO films deposited by magnetron sputtering".applied surface science 255.11(2009):5876-5880.