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	Curvature Correction of FWHM in the X-Ray Rocking Curve of Bent Heteroepitaxial Films
	Wang LJ; Yang H; Jiang DS; Zhao DG; Zhang SM; Wang LJ; Wang YT; Yang H; Zhu JJ; Liu SY
刊名	chinese physics letters
	2009
卷号	26期号:7页码:art. no. 076104
关键词	DENSITIES CRYSTALS LAYERS
ISSN号	0256-307x
通讯作者	zhang sm chinese acad sci state key lab integrated optoelect inst semicond pob 912 beijing 100083 peoples r china. e-mail address: smzhang@red.semi.ac.cn
中文摘要	a method for accurate determination of the curvature radius of semiconductor thin films is proposed. the curvature-induced broadening of the x-ray rocking curve (xrc) of a heteroepitaxially grown layer can be determined if the dependence of the full width at half maximum (fwhm) of xrc is measured as a function of the width of incident x-ray beam. it is found that the curvature radii of two gan films grown on a sapphire wafer are different when they are grown under similar mocvd conditions but have different values of layer thickness. at the same time, the dislocation-induced broadening of xrc and thus the dislocation density of the epitaxial film can be well calculated after the curvature correction.
学科主题	半导体物理
收录类别	SCI
资助信息	national natural science foundation of china 60776047 608360036047602160576003
语种	英语
公开日期	2010-03-08
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/7087]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Wang LJ,Yang H,Jiang DS,et al. Curvature Correction of FWHM in the X-Ray Rocking Curve of Bent Heteroepitaxial Films[J]. chinese physics letters,2009,26(7):art. no. 076104.
APA	Wang LJ.,Yang H.,Jiang DS.,Zhao DG.,Zhang SM.,...&Wang H.(2009).Curvature Correction of FWHM in the X-Ray Rocking Curve of Bent Heteroepitaxial Films.chinese physics letters,26(7),art. no. 076104.
MLA	Wang LJ,et al."Curvature Correction of FWHM in the X-Ray Rocking Curve of Bent Heteroepitaxial Films".chinese physics letters 26.7(2009):art. no. 076104.

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