Enhancement of conductivity and transmittance of ZnO films by post hydrogen plasma treatment

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	Enhancement of conductivity and transmittance of ZnO films by post hydrogen plasma treatment
	Zhang XW; You JB; Yin ZG
刊名	journal of applied physics
	2009
卷号	105 期号:8 页码:art. no. 083713
关键词	annealing carrier density carrier mobility diffusion electrical conductivity electrical resistivity hydrogen II-VI semiconductors impurity states interstitials light transmission plasma materials processing semiconductor thin films sputter deposition vacancies (crystal) visible spectra wide band gap semiconductors zinc compounds
ISSN号	0021-8979
通讯作者	zhang xw chinese acad sci inst semicond key lab semicond mat sci beijing 100083 peoples r china. e-mail address: xwzhang@semi.ac.cn
中文摘要	we studied the effects of hydrogen plasma treatment on the electrical and optical properties of zno films deposited by radio frequency magnetron sputtering. it is found that the zno h film is highly transparent with the average transmittance of 92% in the visible range. both carrier concentration and mobility are increased after hydrogen plasma treatment, correspondingly, the resistivity of the zno h films achieves the order of 10(-3) cm. we suggest that the incorporated hydrogen not only passivates most of the defects and/or acceptors present, but also introduces shallow donor states such as the v-o-h complex and the interstitial hydrogen h-i. moreover, the annealing data indicate that h-i is unstable in zno, while the v-o-h complex remains stable on the whole at 400 degrees c, and the latter diffuses out when the annealing temperature increases to 500 degrees c. these results make zno h more attractive for future applications as transparent conducting electrodes.
学科主题	半导体物理
收录类别	SCI
资助信息	"863" project of china 2006aa03z306 national natural science foundation of china 50601025 60876031
语种	英语
公开日期	2010-03-08
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/7077]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Zhang XW,You JB,Yin ZG. Enhancement of conductivity and transmittance of ZnO films by post hydrogen plasma treatment[J]. journal of applied physics,2009,105(8):art. no. 083713.
APA	Zhang XW,You JB,&Yin ZG.(2009).Enhancement of conductivity and transmittance of ZnO films by post hydrogen plasma treatment.journal of applied physics,105(8),art. no. 083713.
MLA	Zhang XW,et al."Enhancement of conductivity and transmittance of ZnO films by post hydrogen plasma treatment".journal of applied physics 105.8(2009):art. no. 083713.