The structure, morphology and Raman scattering study on Mn-implanted nonpolar a-plane GaN films

CORC > 半导体研究所 > 中国科学院半导体研究所 > 中国科学院半导体研究所（2009年前）

	The structure, morphology and Raman scattering study on Mn-implanted nonpolar a-plane GaN films
	Sun LL ; Yan FW ; Zhang HX ; Wang JX ; Zeng YP ; Wang GH ; Li JM
刊名	materials science and engineering b-advanced functional solid-state materials
	2009
卷号	162 期号:3 页码:209-212
关键词	Ion implantation Metal organic chemical vapour deposition (MOCVD) Diluted magnetic semiconductor (DMS) Nonpolar a-plane GaN
ISSN号	0921-5107
通讯作者	sun ll chinese acad sci inst semicond semicond lighting technol res & dev ctr beijing 100083 peoples r china. e-mail address: lilisun@semi.ac.cn
中文摘要	dilute magnetic nonpolar gan films with a curie temperature above room temperature have been fabricated by implanting mn ions into unintentionally doped nonpolar a-plane (1 1 (2) over bar 0) gan films and a subsequent rapid thermal annealing (rta) process. the impact of the implantation and rta on the structure and morphology of the nonpolar gan films is studied in this paper. the scanning electron microscopy analysis shows that the rta process can effectively recover the implantation-induced damage to the surface morphology of the sample. the x-ray diffraction and micro-raman scattering spectroscopy analyses show that the rta process can just partially recover the implantation-induced crystal deterioration. therefore, the quality of the mn-implanted nonpolar gan films should be improved further for the application in spintronic devices. (c) 2009 elsevier b.v. all rights reserved.
学科主题	半导体材料
收录类别	SCI
资助信息	natural science foundation of china 60876068 srf for rocs 8y1010000 sem
语种	英语
公开日期	2010-03-08
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/7073]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Sun LL,Yan FW,Zhang HX,et al. The structure, morphology and Raman scattering study on Mn-implanted nonpolar a-plane GaN films[J]. materials science and engineering b-advanced functional solid-state materials,2009,162(3):209-212.
APA	Sun LL.,Yan FW.,Zhang HX.,Wang JX.,Zeng YP.,...&Li JM.(2009).The structure, morphology and Raman scattering study on Mn-implanted nonpolar a-plane GaN films.materials science and engineering b-advanced functional solid-state materials,162(3),209-212.
MLA	Sun LL,et al."The structure, morphology and Raman scattering study on Mn-implanted nonpolar a-plane GaN films".materials science and engineering b-advanced functional solid-state materials 162.3(2009):209-212.