Silicon nanopore array structure using porous anodic alumina

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	Silicon nanopore array structure using porous anodic alumina
	Xue CL; Su SJ
刊名	acta physica sinica
	2009
卷号	58 期号:7 页码:4997-5001
关键词	porous anodic alumina mask silicon nanopore array structure pattern transfer
ISSN号	1000-3290
通讯作者	cheng bw chinese acad sci state key lab integrated optoelect inst semicond beijing 100083 peoples r china. e-mail address: anqibai@semi.ac.cn ; cbw@red.semi.ac.cn
中文摘要	a free-standing, bidirectionally permeable and ultra-thin (500-1000 nm) porous anodic alumina membrane was fabricated using a two-step aluminium anodization process, which was then placed on top of a silicon film as an etching mask. the pattern was transferred to silicon using dry-etching technology, and the silicon nanopore array structure was formed. the factors which afflct the pattern transfer process are discussed. observation of the nanopatterned sample under a scanning electron microscope shows that the structure obtained by this method is made up of uniform and highly ordered holes, which attains to 125 nm depth. the photoluminescence spectrum from the nanopatterned sample,the surface of which has been thermal-oxidized, shows that the the luminesce is evidently enhanced, the mechanism of which is based on the normally weak to phonon assisted bandgap light-emission process, and the physical reasons that underlic the enhancement have been analyzed. the pl results do show an attractive optical characteristic, which provides a promising pathway to achieve efficient light emission from silicon.
学科主题	半导体物理
收录类别	SCI
资助信息	major state basic research program of china 2007cb613404 national high technology research and development program of china 2006aa03z415 national natural science foundation of china 60676005
语种	中文
公开日期	2010-03-08
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/7071]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Xue CL,Su SJ. Silicon nanopore array structure using porous anodic alumina[J]. acta physica sinica,2009,58(7):4997-5001.
APA	Xue CL,&Su SJ.(2009).Silicon nanopore array structure using porous anodic alumina.acta physica sinica,58(7),4997-5001.
MLA	Xue CL,et al."Silicon nanopore array structure using porous anodic alumina".acta physica sinica 58.7(2009):4997-5001.