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Structural and optical properties of MgxZn1-xO thin films deposited by radio frequency magnetron sputtering
Zhang, XJ; Ma, HL; Wang, QP; Ma, J; Zong, FJ; Xiao, HD; Ji, F
刊名ACTA PHYSICA SINICA
2005
卷号54期号:9页码:4309-4312
关键词MgxZn1-xO thin films radio frequency magnetron sputtering Mg contents
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内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/6322281
专题山东大学
作者单位Shandong Univ, Sch Phys & Microelect, Jinan 250100, Peoples R China.
推荐引用方式
GB/T 7714
Zhang, XJ,Ma, HL,Wang, QP,et al. Structural and optical properties of MgxZn1-xO thin films deposited by radio frequency magnetron sputtering[J]. ACTA PHYSICA SINICA,2005,54(9):4309-4312.
APA Zhang, XJ.,Ma, HL.,Wang, QP.,Ma, J.,Zong, FJ.,...&Ji, F.(2005).Structural and optical properties of MgxZn1-xO thin films deposited by radio frequency magnetron sputtering.ACTA PHYSICA SINICA,54(9),4309-4312.
MLA Zhang, XJ,et al."Structural and optical properties of MgxZn1-xO thin films deposited by radio frequency magnetron sputtering".ACTA PHYSICA SINICA 54.9(2005):4309-4312.
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