Structural and optical properties of MgxZn1-xO thin films deposited by radio frequency magnetron sputtering | |
Zhang, XJ; Ma, HL; Wang, QP; Ma, J; Zong, FJ; Xiao, HD; Ji, F | |
刊名 | ACTA PHYSICA SINICA
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2005 | |
卷号 | 54期号:9页码:4309-4312 |
关键词 | MgxZn1-xO thin films radio frequency magnetron sputtering Mg contents |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/6322281 |
专题 | 山东大学 |
作者单位 | Shandong Univ, Sch Phys & Microelect, Jinan 250100, Peoples R China. |
推荐引用方式 GB/T 7714 | Zhang, XJ,Ma, HL,Wang, QP,et al. Structural and optical properties of MgxZn1-xO thin films deposited by radio frequency magnetron sputtering[J]. ACTA PHYSICA SINICA,2005,54(9):4309-4312. |
APA | Zhang, XJ.,Ma, HL.,Wang, QP.,Ma, J.,Zong, FJ.,...&Ji, F.(2005).Structural and optical properties of MgxZn1-xO thin films deposited by radio frequency magnetron sputtering.ACTA PHYSICA SINICA,54(9),4309-4312. |
MLA | Zhang, XJ,et al."Structural and optical properties of MgxZn1-xO thin films deposited by radio frequency magnetron sputtering".ACTA PHYSICA SINICA 54.9(2005):4309-4312. |
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